Dr. Chun Chi Yu
Manager at United Microelectronics Corp
SPIE Involvement:
Publications (42)

Proceedings Article | 26 March 2019 Paper
Proceedings Volume 10959, 109592T (2019) https://doi.org/10.1117/12.2514984
KEYWORDS: Semiconducting wafers, Optical alignment, Data modeling, Overlay metrology, Data corrections, Visualization, Lithography, Reticles, Optimization (mathematics)

Proceedings Article | 28 March 2017 Paper
Ming-Jui Chen, Chun-Chi Yu, Tang Chun Weng, C.-H. Chang, Charlie Chen, Chia Ching Lin, En Chuan Lio, Chia Hsiang Yu
Proceedings Volume 10145, 1014525 (2017) https://doi.org/10.1117/12.2257631
KEYWORDS: Data modeling, Solids, Scanners, Stars, Mathematical modeling

Proceedings Article | 3 October 2016 Paper
Tuan-Yen Yu, En Chuan Lio, Po Tsang Chen, Chih I Wei, Yi Ting Chen, Ming Chun Peng, William Chou, Chun Chi Yu
Proceedings Volume 9985, 99850Y (2016) https://doi.org/10.1117/12.2234760
KEYWORDS: Photomasks, Lithography, Photoresist materials, Modulation, Photoresist processing, Integrated optics, Semiconducting wafers, Molybdenum, Finite element methods, Silicon

Proceedings Article | 8 March 2016 Paper
Gary Wang, En Chuan Lio, Yuting Hung, Charlie Chen, Sybil Wang, Tang Chun Weng, Bill Lin, Chun Chi Yu
Proceedings Volume 9778, 97782U (2016) https://doi.org/10.1117/12.2219501
KEYWORDS: Optical lithography, Etching, Signal processing, Lithography, Image processing, Overlay metrology, Photoresist processing, Scanning electron microscopy, Semiconducting wafers, Amorphous silicon

Proceedings Article | 23 October 2015 Paper
William Chou, James Cheng, Alex Tseng, J. Wu, Chin Kuei Chang, Jeffrey Cheng, Adder Lee, Chain Ting Huang, N. Peng, Simon C. Hsu, Chun Chi Yu, Colbert Lu, Julia Yu, Peter Craig, Chuck Pollock, Young Ham, Jeff McMurran
Proceedings Volume 9635, 96351R (2015) https://doi.org/10.1117/12.2196794
KEYWORDS: Photomasks, Semiconducting wafers, Overlay metrology, Image registration, Double patterning technology, Lithography, Source mask optimization, Reticles, Pellicles, 193nm lithography

Showing 5 of 42 publications
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