PROCEEDINGS VOLUME 4601
INTERNATIONAL SYMPOSIUM ON OPTOELECTONICS AND MICROELECTRONICS | 7-10 NOVEMBER 2001
Micromachining and Microfabrication Process Technology and Devices
IN THIS VOLUME

0 Sessions, 75 Papers, 0 Presentations
Sensors II  (7)
Actuation  (6)
Sensors I  (6)
Modeling  (5)
INTERNATIONAL SYMPOSIUM ON OPTOELECTONICS AND MICROELECTRONICS
7-10 November 2001
Nanjing, China
Sensors II
Proc. SPIE 4601, Label-free DNA hybridization detection with molecular beacon immobilized in photopolymerized acrylamide gel microarray, 0000 (15 October 2001); doi: 10.1117/12.444684
Micromachining I
Proc. SPIE 4601, Comparison of the silicon three main crystal planes' surface roughness after etching in aqueous potassium hydroxide solutions, 0000 (15 October 2001); doi: 10.1117/12.444695
Optical Devices
Proc. SPIE 4601, Fiber-optic choline biosensor, 0000 (15 October 2001); doi: 10.1117/12.444715
Sensors II
Proc. SPIE 4601, Position sensor in micro-electro-mechanical systems using a self-mixing laser diode, 0000 (15 October 2001); doi: 10.1117/12.444733
Actuation
Proc. SPIE 4601, Design of thin-film-based microgrippers, 0000 (15 October 2001); doi: 10.1117/12.444741
Poster Session
Proc. SPIE 4601, Preparation and photoluminescence of nanowire array and films of cadmium sulfide by electrodepositing in organic solvent, 0000 (15 October 2001); doi: 10.1117/12.444758
Micromachining II
Proc. SPIE 4601, Polymer and glass etching by ArF and XeCl excimer lasers, 0000 (15 October 2001); doi: 10.1117/12.444685
Actuation
Proc. SPIE 4601, Characterization and MEMS application of sputtered TiNi shape memory alloy thin films, 0000 (15 October 2001); doi: 10.1117/12.444686
Poster Session
Proc. SPIE 4601, Mechanics characteristics of an electrostatic optical switch, 0000 (15 October 2001); doi: 10.1117/12.444687
Sensors II
Proc. SPIE 4601, Metallic oxide semiconductor field effect-transistor array-compound-type gas chemical microsensor, 0000 (15 October 2001); doi: 10.1117/12.444688
Optical Devices
Proc. SPIE 4601, Magnetically actuated MEMS variable optical attenuator, 0000 (15 October 2001); doi: 10.1117/12.444689
Poster Session
Proc. SPIE 4601, Modeling and fabrication of micro 3K-2-type planetary gear reducer utilizing SU-8 photoresist as alternative LIGA technology, 0000 (15 October 2001); doi: 10.1117/12.444690
Micromachining I
Proc. SPIE 4601, Atomic force microscope using a diamond tip: a tool for micro/nanomachining on single-crystal silicon surface, 0000 (15 October 2001); doi: 10.1117/12.444691
Poster Session
Proc. SPIE 4601, High-aspect-ratio PMMA microstructures fabricated by RIE, 0000 (15 October 2001); doi: 10.1117/12.444692
Sensors I
Proc. SPIE 4601, Surface-micromachined double-sided touch mode capacitive pressure sensor, 0000 (15 October 2001); doi: 10.1117/12.444693
Modeling
Proc. SPIE 4601, Experiments and a new model on damping in rare air, 0000 (15 October 2001); doi: 10.1117/12.444694
Sensors I
Proc. SPIE 4601, Phase detection scheme of vibratory gyroscope by 2D driving operation, 0000 (15 October 2001); doi: 10.1117/12.444696
Poster Session
Proc. SPIE 4601, Preparation and performance of silicon microchannel plate, 0000 (15 October 2001); doi: 10.1117/12.444697
Micromachining II
Proc. SPIE 4601, Fabrication of high-aspect-ratio microstructure on metallic substrate using SU-8 resist, 0000 (15 October 2001); doi: 10.1117/12.444698
Actuation
Proc. SPIE 4601, Hydrogen-induced actuation: a new active mechanism for MEMS, 0000 (15 October 2001); doi: 10.1117/12.444699
RF Applications
Proc. SPIE 4601, Surface-acoustic-wave device-based wireless measurement platform for sensors, 0000 (15 October 2001); doi: 10.1117/12.444700
Poster Session
Proc. SPIE 4601, Application of liquid crystal display for binary optics, 0000 (15 October 2001); doi: 10.1117/12.444701
Modeling
Proc. SPIE 4601, Numerical modeling of a SiN beam resonant pressure sensor, 0000 (15 October 2001); doi: 10.1117/12.444702
Poster Session
Proc. SPIE 4601, Design and simulation of a multifinger micromechanical silicon accelerometer, 0000 (15 October 2001); doi: 10.1117/12.444703
Micromachining II
Proc. SPIE 4601, DEM microfabrication technique and its applications in bioscience and microfluidic systems, 0000 (15 October 2001); doi: 10.1117/12.444704
Poster Session
Proc. SPIE 4601, Numerical analysis of a composite diaphragm microactuator, 0000 (15 October 2001); doi: 10.1117/12.444705
Proc. SPIE 4601, Electrochemical studies of electrodeposition of nickel for LIGA microstructures, 0000 (15 October 2001); doi: 10.1117/12.444706
Proc. SPIE 4601, Electrochemical microactuator based on hydrogen-absorbing film: the principle and first results, 0000 (15 October 2001); doi: 10.1117/12.444707
Modeling
Proc. SPIE 4601, Study of signal process of gas sensor array with nonlinear principal component analysis, 0000 (15 October 2001); doi: 10.1117/12.444708
Sensors II
Proc. SPIE 4601, Measurement of heat capacity of SnO2 thin films using micro-hotplate, 0000 (15 October 2001); doi: 10.1117/12.444709
Modeling
Proc. SPIE 4601, Adaptive modeling of MEMS system-level simulation based on evolutionary computation, 0000 (15 October 2001); doi: 10.1117/12.444710
Sensors II
Proc. SPIE 4601, Absorption and emission properties of F-center-OH- defect pairs in cesium halides, 0000 (15 October 2001); doi: 10.1117/12.444711
Optical Devices
Proc. SPIE 4601, LD array end-pumped Nd:YVO4 laser with an optical isolator, 0000 (15 October 2001); doi: 10.1117/12.444712
Micromachining I
Proc. SPIE 4601, Gray-scale mask fabrication system for diffractive micro-optics, 0000 (15 October 2001); doi: 10.1117/12.444713
Actuation
Proc. SPIE 4601, Driving property of twist-roller friction mechanism in ultraprecision positioning system, 0000 (15 October 2001); doi: 10.1117/12.444714
Proc. SPIE 4601, Structural optimization of NiTi/Si diaphragm used in micropumps, 0000 (15 October 2001); doi: 10.1117/12.444716
Poster Session
Proc. SPIE 4601, Development of microflowmeters and microlenses using a new 3D microfabrication-DEM technique, 0000 (15 October 2001); doi: 10.1117/12.444717
Micromachining I
Proc. SPIE 4601, Effect of annealing on mechanical and optical properties of in-situ doped SiC thin films, 0000 (15 October 2001); doi: 10.1117/12.444718
Sensors I
Proc. SPIE 4601, Novel silicon-micromachined gyroscope with high Q at atmosphere, 0000 (15 October 2001); doi: 10.1117/12.444719
Optical Devices
Proc. SPIE 4601, MEMS-based variable optical attenuator, 0000 (15 October 2001); doi: 10.1117/12.444720
Poster Session
Proc. SPIE 4601, Forces balance of micromachined accelerometer, 0000 (15 October 2001); doi: 10.1117/12.444721
Proc. SPIE 4601, Parallel manipulator for micro-assembly and micromachining, 0000 (15 October 2001); doi: 10.1117/12.444722
Sensors II
Proc. SPIE 4601, Novel CMOS two-dimensional integrated gas flow sensor, 0000 (15 October 2001); doi: 10.1117/12.444723
Sensors I
Proc. SPIE 4601, Capacitive humidity sensor in CMOS technology, 0000 (15 October 2001); doi: 10.1117/12.444724
RF Applications
Proc. SPIE 4601, Micromachined variable capacitors with laterally positioned suspended plates, 0000 (15 October 2001); doi: 10.1117/12.444725
Poster Session
Proc. SPIE 4601, Capacitance-coupling micromechanical filter, 0000 (15 October 2001); doi: 10.1117/12.444726
Sensors I
Proc. SPIE 4601, Integrated pressure-sensing microsystem by CMOS IC technology for barometal applications, 0000 (15 October 2001); doi: 10.1117/12.444727
Micromachining II
Proc. SPIE 4601, Novel technique of laser shocking fine partial forming of metal sheet, 0000 (15 October 2001); doi: 10.1117/12.444728
Sensors II
Proc. SPIE 4601, Novel micromachined thermal anemometer based on lateral polysilicon diode flow sensor, 0000 (15 October 2001); doi: 10.1117/12.444729
Actuation
Proc. SPIE 4601, Effect of microstructure of TiNi/Si diaphragm on thermal-actuating performance, 0000 (15 October 2001); doi: 10.1117/12.444730
Poster Session
Proc. SPIE 4601, Surface relief of TiNiCu thin films, 0000 (15 October 2001); doi: 10.1117/12.444731
Proc. SPIE 4601, Design, fabrication, and characteristics of microheaters with low consumption power using SDB SOI membrane and trench structures, 0000 (15 October 2001); doi: 10.1117/12.444732
Proc. SPIE 4601, Micromachined optical switch with a vertical SU-8 mirror, 0000 (15 October 2001); doi: 10.1117/12.444734
Proc. SPIE 4601, Fabrication of InGaAs/InGaAsP microcylinder by wet chemical etching, 0000 (15 October 2001); doi: 10.1117/12.444735
Micromachining I
Proc. SPIE 4601, Design, simulation, and evaluation of novel corrugated diaphragms based on backside sacrificial layer etching technique, 0000 (15 October 2001); doi: 10.1117/12.444736
Poster Session
Proc. SPIE 4601, Angular-dependent magnetoresistance characteristics in Si(001)/NiO(300 A)/NiFe(t) bilayer system, 0000 (15 October 2001); doi: 10.1117/12.444737
Proc. SPIE 4601, Wheastone-bridge-type MR sensors of Si(001)/NiO(300 A)/NiFe bilayer system, 0000 (15 October 2001); doi: 10.1117/12.444738