PROCEEDINGS VOLUME 6800
SPIE MICROELECTRONICS, MEMS, AND NANOTECHNOLOGY | 4-7 DECEMBER 2007
Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
Proceedings Volume 6800 is from: Logo
SPIE MICROELECTRONICS, MEMS, AND NANOTECHNOLOGY
4-7 December 2007
Canberra, ACT, Australia
Front Matter
Proc. SPIE 6800, Front Matter: Volume 6800, 680001 (12 March 2008); doi: 10.1117/12.786795
Electrochromic and Microfluidics
Proc. SPIE 6800, Electrochromic device technology based on nanoporous nanocrystalline thin films on PET foil, 680002 (11 January 2008); doi: 10.1117/12.759040
Proc. SPIE 6800, Microfluidic photonic crystal nanocavities, 680003 (9 January 2008); doi: 10.1117/12.765089
Proc. SPIE 6800, Reversible wetting of titanium dioxide films, 680004 (11 January 2008); doi: 10.1117/12.759438
Organic Devices and C-based Nanostructures
Proc. SPIE 6800, The effect of temperature and gas flow on the physical vapour growth of mm-scale rubrene crystals for organic FETs, 680005 (9 January 2008); doi: 10.1117/12.759015
Proc. SPIE 6800, Inkjet printing: a viable tool for processing polymer carbon nanotube composites, 680007 (9 January 2008); doi: 10.1117/12.758999
Nanowires
Proc. SPIE 6800, Hydrogen sensors based on percolation and tunneling in films of palladium clusters, 680009 (9 January 2008); doi: 10.1117/12.753487
Proc. SPIE 6800, Engineering of hole-spin polarization in nanowires, 68000A (9 January 2008); doi: 10.1117/12.765230
MEMS I
Proc. SPIE 6800, A novel 3D low voltage electrostatic RF MEMS switch with two movable electrodes, 68000D (9 January 2008); doi: 10.1117/12.758981
Proc. SPIE 6800, Influence of surface roughness on capillary and Casimir forces, 68000E (9 January 2008); doi: 10.1117/12.764436
Transport in Nanostructures and Quantum Computing
Proc. SPIE 6800, Four-tip scanning tunneling microscope for measuring transport in nanostructures, 68000G (9 January 2008); doi: 10.1117/12.764823
Proc. SPIE 6800, Nuclear spin manipulation in semiconductor nanostructures, 68000H (9 January 2008); doi: 10.1117/12.767747
Nanofabrication Techniques
Proc. SPIE 6800, Fabrication of sub-wavelength periodic structures upon high-refractive-index glasses by precision glass molding, 68000M (9 January 2008); doi: 10.1117/12.758716
MEMS II
Proc. SPIE 6800, Specialized hybrid batch fabrication process for MEMS RF voltage sensors, 68000P (9 January 2008); doi: 10.1117/12.759425
Proc. SPIE 6800, A novel out-of-plane micro-mirror actuator, 68000Q (9 January 2008); doi: 10.1117/12.759340
Proc. SPIE 6800, Mechanical characteristics of filter structures for MEMS adaptive infrared detectors, 68000R (9 January 2008); doi: 10.1117/12.758816
Photonics/Optoelectronics
Proc. SPIE 6800, Point defect engineered Si sub-bandgap light-emitting diodes, 68000T (9 January 2008); doi: 10.1117/12.758543
Proc. SPIE 6800, Effects of spacer growth temperature on the optical properties of quantum dot laser structures, 68000U (11 January 2008); doi: 10.1117/12.759663
Proc. SPIE 6800, Photodarkening study of gratings written into rare-earth doped optical fibres using a femtosecond laser, 68000V (11 January 2008); doi: 10.1117/12.760829
Detectors, PV, and Sensors
Proc. SPIE 6800, Toward very large format infrared detector arrays, 68000W (9 January 2008); doi: 10.1117/12.753485
Proc. SPIE 6800, Impurities in solar-grade silicon, 68000X (9 January 2008); doi: 10.1117/12.753494
Proc. SPIE 6800, Microstructured humidity sensors fabricated by glancing angle deposition: characterization and performance evaluation, 68000Y (9 January 2008); doi: 10.1117/12.759533
Proc. SPIE 6800, Sliver solar cells, 680010 (9 January 2008); doi: 10.1117/12.759594
Poster Session
Proc. SPIE 6800, Photovoltaic properties of ferroelectrics and their applications to optical sensor, 680011 (11 January 2008); doi: 10.1117/12.760416
Proc. SPIE 6800, Optical and conductivity dependence on doping concentration of polyaniline nanofibers, 680012 (11 January 2008); doi: 10.1117/12.758331
Proc. SPIE 6800, Optical characteristics of coated long-period fiber grating and their sensing application, 680013 (11 January 2008); doi: 10.1117/12.758804
Proc. SPIE 6800, SOI waveguide fabrication process development using star coupler scattering loss measurements, 680014 (11 January 2008); doi: 10.1117/12.758968
Proc. SPIE 6800, A micro solar heater for portable energy generation, 68001A (11 January 2008); doi: 10.1117/12.759263
Proc. SPIE 6800, Development of a flexible luminous device using hollow cathode discharge, 68001B (9 January 2008); doi: 10.1117/12.759273
Proc. SPIE 6800, Positron annihilation lifetime spectroscopy (PALS) and small angle x-ray scattering (SAXS) of self-assembled amphiphiles, 68001C (9 January 2008); doi: 10.1117/12.759243
Proc. SPIE 6800, Characterization of epiready n+-GaAs (100) surfaces by SPV-transient, 68001D (9 January 2008); doi: 10.1117/12.759378
Proc. SPIE 6800, The investigations of InAs quantum dots overgrown on In0.1Ga0.9As surfactant layer and 10º off-angle (100) GaAs substrate, 68001E (9 January 2008); doi: 10.1117/12.759448
Proc. SPIE 6800, Effect of thermal stress and diameter on I-V characteristics of template synthesized Cu-Se heterostructures, 68001H (11 January 2008); doi: 10.1117/12.759582
Proc. SPIE 6800, Etching lithium niobate during Ti diffusion process, 68001J (9 January 2008); doi: 10.1117/12.759612
Proc. SPIE 6800, Single particle and momentum relaxation times in two-dimensional electron systems (updated May 14, 2008), 68001L (9 January 2008); doi: 10.1117/12.759655
Proc. SPIE 6800, Optical properties of template synthesized nanowalled ZnS microtubules, 68001M (9 January 2008); doi: 10.1117/12.759814
Proc. SPIE 6800, Characteristics of hetero-junction diodes based on ion beam sputtered ZnO thin films, 68001P (9 January 2008); doi: 10.1117/12.768752
Proc. SPIE 6800, A surface-plasmon resonance phase modulation bio-reaction detection system with (5,1) phase-shifting algorithm, 68001Q (9 January 2008); doi: 10.1117/12.769156
Proc. SPIE 6800, A novel fabrication method of needle array combined x-ray gray mask with LIGA process, 68001R (9 January 2008); doi: 10.1117/12.753858
Proc. SPIE 6800, Design, fabrication, and testing of 3C-SiC sensors for high temperature applications, 68001S (11 January 2008); doi: 10.1117/12.758245
Proc. SPIE 6800, High sensitivity capacitive MEMS microphone with spring supported diaphragm, 68001T (9 January 2008); doi: 10.1117/12.758987
Proc. SPIE 6800, Novel MEMS-based thermometer with low power consumption for health-monitoring network application, 68001V (9 January 2008); doi: 10.1117/12.759296
Proc. SPIE 6800, Fabrication of smooth 45° micromirror using TMAH low concentration solution with NCW-601A surfactant on <100> silicon, 68001W (9 January 2008); doi: 10.1117/12.759343
Proc. SPIE 6800, Measurements of silicon dry-etching rates and profiles in MEMS foundries and their application to MEMS design software, 68001X (9 January 2008); doi: 10.1117/12.759374
Proc. SPIE 6800, Mechanical quality factor of microcantilevers for mass sensing applications, 68001Y (9 January 2008); doi: 10.1117/12.759393
Proc. SPIE 6800, Sensing gap reconfigurable capacitive type MEMS accelerometer, 68001Z (9 January 2008); doi: 10.1117/12.759392
Proc. SPIE 6800, Study on in-situ measuring method for average stress gradient of a MEMS film, 680020 (9 January 2008); doi: 10.1117/12.759463
Proc. SPIE 6800, Design and fabrication process of a micropump using bulk Pb(Zr,Ti)O3 for microfluidic devices, 680022 (9 January 2008); doi: 10.1117/12.759548
Proc. SPIE 6800, RF-MEMS switches with new beam geometries: improvement of yield and lowering of actuation voltage, 680026 (9 January 2008); doi: 10.1117/12.769331
Proc. SPIE 6800, RF-MEMS switches: design and performance in wireless applications, 680027 (11 January 2008); doi: 10.1117/12.769359
Proc. SPIE 6800, Nanometric material removal using the electrokinetic phenomenon, 680028 (11 January 2008); doi: 10.1117/12.769686
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