Dr. Aaron Stein
Research Associate at Brookhaven National Lab
SPIE Involvement:
Publications (24)

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12957, 129570H (2024) https://doi.org/10.1117/12.3010916
KEYWORDS: Etching, Electron beam lithography, Plasma etching, Lithography, Photoresist developing

Proceedings Article | 13 March 2024 Presentation + Paper
Proceedings Volume 12905, 1290506 (2024) https://doi.org/10.1117/12.3001052
KEYWORDS: Photonic crystals, Design, Continuous wave operation, Heterojunctions, Semiconductor lasers, Polarization, Gallium antimonide, Diodes

Proceedings Article | 30 April 2023 Presentation
Gregory Doerk, Aaron Stein, Suwon Bae, Marcus Noack, Masafumi Fukuto, Ashish Kulkarni, Kristof Toth, Chinedum Osuji, Kevin Yager
Proceedings Volume PC12497, PC124970I (2023) https://doi.org/10.1117/12.2660507
KEYWORDS: Directed self assembly, Polymers, X-rays, X-ray microscopy, Scattering, Scanning electron microscopy, Resolution enhancement technologies, Nanostructures, Lithography, Grazing incidence

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12498, 1249810 (2023) https://doi.org/10.1117/12.2658685
KEYWORDS: High volume manufacturing, Extreme ultraviolet lithography, Atomic layer deposition, Photoresist materials, Electron beam lithography, Thin films, Silicon, Resistance, Polymethylmethacrylate, Photoresist processing

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12498, 124981A (2023) https://doi.org/10.1117/12.2658659
KEYWORDS: Optical lithography, Oxides, Metals, Polymer thin films, Nanolithography, Nanocomposites, Materials processing, Lithography, Extreme ultraviolet lithography, Extreme ultraviolet

Showing 5 of 24 publications
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