Dr. Chang-Yong Nam
Scientist at Brookhaven National Lab
SPIE Involvement:
Area of Expertise:
Nanostructured semiconductor , Electrical transport measurement , Organic solar cells , Energy conversion devices , Nanofabrication , Semiconductor nanowires
Profile Summary

Dr. Chang-Yong Nam
Center for Functional Nanomaterials
Brookhaven National Laboratory
Upton, New York 11973
Tel: 631-344-7066
E-mail: cynam@bnl.gov

Web: www.bnl.gov/cfn
LinkedIn: http://www.linkedin.com/in/cynam
Blogger: http://energybnl.blogspot.com/

Scientist, BNL, 2016-Present
Adjunct Professor, Dept. Materials Science and Chemical Engineering, Stony Brook Univ., 2014-Present
Associate Scientist, BNL, 2013-2016
Assistant Scientist, BNL, 2010-2013
Goldhaber Distinguished Fellow, BNL, 2007-2010
Commissioned Researcher, Korea Inst. Sci. & Tech. (KIST), 2001-2002

Ph.D., Materials Science and Engineering, University of Pennsylvania, 2007
M.S., Materials Science and Engineering, KAIST, 2001
B.E., Metallurgical Engineering, Korea University, 1999

Chang-Yong Nam is a Scientist at the Center for Functional Nanomaterials of the Brookhaven National Laboratory (BNL). His research is focused on two primary objectives: a) Development of atomic layer deposition (ALD) techniques towards microelectronics and energy application; b) Materials processing and device physics in organic, hybrid, and low-dimensional semiconductors.

Publications (14)

Proceedings Article | 10 April 2024 Presentation
Proceedings Volume PC12956, PC129560U (2024) https://doi.org/10.1117/12.3010072
KEYWORDS: Advanced patterning, Optical lithography, Photoresist materials, Metal oxides, Block copolymers, Polymers, Nanostructures, Matrices, Materials properties, Extreme ultraviolet lithography

Proceedings Article | 9 April 2024 Presentation + Paper
Dan Le, Thi Thu Huong Chu, Jin-Hyun Kim, Jean-Francois Veyan, Won-Il Lee, Nikhil Tiwale, Minjong Lee, Seungsoo Choi, Jihoon Woo, Chang-Yong Nam, Rino Choi, Jiyoung Kim
Proceedings Volume 12957, 129570B (2024) https://doi.org/10.1117/12.3010970
KEYWORDS: Thin films, Film thickness, X-ray photoelectron spectroscopy, Atomic layer deposition, Chemical analysis, Aluminum, Carbon monoxide, Materials science, Extreme ultraviolet lithography, Engineering

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12498, 1249810 (2023) https://doi.org/10.1117/12.2658685
KEYWORDS: High volume manufacturing, Extreme ultraviolet lithography, Atomic layer deposition, Photoresist materials, Electron beam lithography, Thin films, Silicon, Resistance, Polymethylmethacrylate, Photoresist processing

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12498, 124981A (2023) https://doi.org/10.1117/12.2658659
KEYWORDS: Optical lithography, Oxides, Metals, Polymer thin films, Nanolithography, Nanocomposites, Materials processing, Lithography, Extreme ultraviolet lithography, Extreme ultraviolet

Proceedings Article | 1 December 2022 Presentation + Paper
Proceedings Volume 12292, 1229205 (2022) https://doi.org/10.1117/12.2641647
KEYWORDS: Thin films, Extreme ultraviolet lithography, Electron beam lithography, FT-IR spectroscopy, Photoresist materials, Chemical reactions, Floods, Atomic layer deposition, Chemical analysis, Thin film deposition

Showing 5 of 14 publications
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