Dr. Boris V. Yakshinskiy
Postdoctoral fellow at Rutgers The State Univ of New Jersey
SPIE Involvement:
Publications (10)

Proceedings Article | 21 March 2016 Paper
Feixiang Luo, Viacheslav Manichev, Mengjun Li, Gavin Mitchson, Boris Yakshinskiy, Torgny Gustafsson, David Johnson, Eric Garfunkel
Proceedings Volume 9779, 977928 (2016) https://doi.org/10.1117/12.2219239
KEYWORDS: Ions, Helium, Electrons, Electron beam lithography, Line edge roughness, Monte Carlo methods, Ion beam lithography, Extreme ultraviolet lithography, Silicon, Scanning helium ion microscopy

Proceedings Article | 8 April 2011 Paper
B. Yakshinskiy, Q. Shen, R. Bartynski
Proceedings Volume 7969, 796922 (2011) https://doi.org/10.1117/12.879297
KEYWORDS: Carbon, Graphene, Ruthenium, Telescopic pixel displays, Molecules, Contamination, Scanning tunneling microscopy, Extreme ultraviolet, Temperature metrology, Extreme ultraviolet lithography

Proceedings Article | 22 March 2010 Paper
B. Yakshinskiy, R. Bartynski
Proceedings Volume 7636, 76360F (2010) https://doi.org/10.1117/12.846645
KEYWORDS: Carbon, Ruthenium, Telescopic pixel displays, Adsorption, Extreme ultraviolet lithography, Ions, Temperature metrology, Graphene, Extreme ultraviolet, Molecules

Proceedings Article | 18 March 2009 Paper
Proceedings Volume 7271, 727113 (2009) https://doi.org/10.1117/12.814111
KEYWORDS: Contamination, Extreme ultraviolet lithography, Protactinium, Molecules, Extreme ultraviolet, Reflectivity, Carbon, Synchrotrons, Molecular interactions, Titanium dioxide

Proceedings Article | 18 March 2009 Paper
B. Yakshinskiy, S. Zalkind, R. Bartynski, R. Caudillo, T. Madey
Proceedings Volume 7271, 727110 (2009) https://doi.org/10.1117/12.814385
KEYWORDS: Carbon, Telescopic pixel displays, Adsorption, Extreme ultraviolet lithography, Molecules, Temperature metrology, Mirrors, Extreme ultraviolet, Photons, Titanium dioxide

Showing 5 of 10 publications
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