Andrew C. Rudack
Sr Metrology Specialist at SUNY Poly SEMATECH
SPIE Involvement:
Publications (12)

Proceedings Article | 8 October 2014 Paper
Kristopher Davis, Joseph Walters, Eric Schneller, Hubert Seigneur, R. Paul Brooker, Giuseppe Scardera, Marianne Rodgers, Nahid Mohajeri, Narendra Shiradkar, Neelkanth Dhere, John Wohlgemuth, Andrew Rudack, Winston Schoenfeld
Proceedings Volume 9179, 91790Y (2014)
KEYWORDS: Manufacturing, Reliability, Metrology, Silicon, Semiconducting wafers, Photovoltaics, Crystals, Solar cells, Diodes, Silicon solar cells

SPIE Journal Paper | 5 June 2013
Lay Wai Kong, James Lloyd, Andrew Rudack, Alain Diebold
JM3, Vol. 12, Issue 02, 023010, (June 2013)
KEYWORDS: Annealing, X-rays, Finite element methods, Semiconducting wafers, Tomography, Copper, Inspection, X-ray imaging, X-ray microscopy, Silicon

Proceedings Article | 5 April 2012 Paper
A. Rudack, J. Nadeau, R. Routh, R. Young
Proceedings Volume 8324, 832413 (2012)
KEYWORDS: Plating, Ions, Metrology, Copper, Semiconducting wafers, Plasma, Inspection, Xenon, Scanning electron microscopy, Ion beams

Proceedings Article | 4 April 2012 Open Access Paper
Proceedings Volume 8324, 832403 (2012)
KEYWORDS: Semiconducting wafers, 3D metrology, Metrology, Inspection, Wafer bonding, Copper, Overlay metrology, Microscopes, Etching, Infrared microscopy

Proceedings Article | 3 April 2012 Paper
L. Kong, J. Lloyd, M. Liehr, A. Rudack, S. Arkalgud, A. Diebold
Proceedings Volume 8324, 832412 (2012)
KEYWORDS: X-rays, Annealing, Tomography, Inspection, Semiconducting wafers, X-ray microscopy, Copper, X-ray imaging, Silicon, 3D image processing

Showing 5 of 12 publications
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