Dr. Dongbing Shao
at IBM Corp
SPIE Involvement:
Publications (9)

Proceedings Article | 20 March 2019 Paper
Dongbing Shao, Jing Sha, Jinning Liu, Robert Wong
Proceedings Volume 10962, 109620Y (2019) https://doi.org/10.1117/12.2515636
KEYWORDS: Semiconducting wafers, Monte Carlo methods, Design for manufacturing, Optical lithography, Semiconductor manufacturing

Proceedings Article | 4 April 2017 Presentation + Paper
Eric Eastman, Dureseti Chidambarrao, Werner Rausch, Rasit Topaloglu, Dongbing Shao, Ravikumar Ramachandran, Matthew Angyal
Proceedings Volume 10148, 101480I (2017) https://doi.org/10.1117/12.2258002
KEYWORDS: Monte Carlo methods, Computer simulations, Tolerancing, 3D modeling, Lithography, Semiconductors, Logic, Performance modeling, Process engineering, Data modeling, Manufacturing, Design for manufacturability, Detection and tracking algorithms, Statistical modeling, Systems modeling

Proceedings Article | 16 March 2016 Paper
Dongbing Shao, Larry Clevenger, Lei Zhuang, Lars Liebmann, Robert Wong, James Culp
Proceedings Volume 9781, 978106 (2016) https://doi.org/10.1117/12.2218636
KEYWORDS: Monte Carlo methods, Semiconducting wafers, Design for manufacturability, Manufacturing, Semiconductors, Diffractive optical elements, Microelectronics, Protactinium, Process modeling

Proceedings Article | 9 September 2013 Paper
Dongbing Shao, Bidan Zhang, Shayak Banerjee, Hong Kry, Anuja De Silva, Ranee Kwong, Kisup Chung, Yea-Sen Lin, Alan Leslie
Proceedings Volume 8880, 88802L (2013) https://doi.org/10.1117/12.2029356
KEYWORDS: Critical dimension metrology, Silicon, Etching, Semiconducting wafers, Optical proximity correction, Reflectivity, Near field optics, Computational lithography, Optical lithography, Data modeling

Proceedings Article | 23 March 2011 Paper
Chandra Sarma, Todd Bailey, Adam Lyons, Dongbing Shao
Proceedings Volume 7973, 797315 (2011) https://doi.org/10.1117/12.879213
KEYWORDS: 3D modeling, Semiconducting wafers, Photoresist processing, Critical dimension metrology, Silicon, Photovoltaics, Lithography, Data modeling, Visualization, Metrology

Showing 5 of 9 publications
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