Dr. Guenter Hess
at LIMO GmbH
SPIE Involvement:
Publications (21)

Proceedings Article | 15 May 2007 Paper
Proceedings Volume 6607, 66073D (2007) https://doi.org/10.1117/12.729032
KEYWORDS: Etching, Dry etching, Extreme ultraviolet lithography, Reflectivity, Photomasks, Inspection, Scanning electron microscopy, Mask making, Electron beam lithography, Manufacturing

Proceedings Article | 20 October 2006 Paper
Hans Becker, Markus Renno, Guenter Hess, Ute Buttgereit, Corinna Koepernik, Lorenz Nedelmann, Mathias Irmscher, Robert Birkner, Axel Zibold, Thomas Scheruebl
Proceedings Volume 6349, 63490J (2006) https://doi.org/10.1117/12.686022
KEYWORDS: Photomasks, Phase shifts, Etching, Silica, Tantalum, Lithography, Optical lithography, Semiconducting wafers, Scanners, Phase shifting

Proceedings Article | 21 June 2006 Paper
Uwe Mickan, Rogier Groeneveld, Marcel Demarteau, Jan Hendrik Peters, Uwe Dersch, Günter Hess, Holger Seitz
Proceedings Volume 6281, 628105 (2006) https://doi.org/10.1117/12.692629
KEYWORDS: Photomasks, Extreme ultraviolet, Reticles, Etching, Tolerancing, Image processing, Coating, Printing, Lithography, Reflectivity

Proceedings Article | 23 March 2006 Paper
Mathias Irmscher, Joerg Butschke, Guenter Hess, Corinna Koepernik, Florian Letzkus, Markus Renno, Holger Sailer, Hubert Schulz, Anatol Schwersenz, Ecron Thompson
Proceedings Volume 6151, 615115 (2006) https://doi.org/10.1117/12.656108
KEYWORDS: Etching, Quartz, Nanoimprint lithography, Photoresist processing, Photomasks, Chromium, Manufacturing, Electron beam lithography, Chemically amplified resists, Beam shaping

Proceedings Article | 22 March 2006 Paper
Holger Seitz, Markus Renno, Thomas Leutbecher, Nathalie Olschewski, Torsten Reichardt, Ronny Walter, Helmut Popp, Günter Hess, Florian Letzkus, Jörg Butschke, Mathias Irmscher
Proceedings Volume 6151, 615109 (2006) https://doi.org/10.1117/12.655540
KEYWORDS: Photomasks, Extreme ultraviolet lithography, Etching, Extreme ultraviolet, Multilayers, Dry etching, Polishing, Manufacturing, Reflectivity, Coating

Showing 5 of 21 publications
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