Dr. Dominik Metzler
Advisory Engineer at IBM Research
SPIE Involvement:
Publications (7)

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12056, PC120560A (2022) https://doi.org/10.1117/12.2614316
KEYWORDS: Optical lithography, Etching, Plasma etching, Plasma, Nanotechnology, Extreme ultraviolet, Line width roughness, Ions, Fin field effect transistors, Extreme ultraviolet lithography

Proceedings Article | 24 March 2020 Presentation
Proceedings Volume 11326, 113260W (2020) https://doi.org/10.1117/12.2552112

Proceedings Article | 24 March 2020 Presentation
Proceedings Volume 11323, 113230M (2020) https://doi.org/10.1117/12.2551319
KEYWORDS: Optical lithography, Stochastic processes, Extreme ultraviolet, Extreme ultraviolet lithography, Etching, Photoresist materials, Photoresist developing, Lithography, Interfaces, Absorbance

Proceedings Article | 23 March 2020 Presentation + Paper
Dominik Metzler, Mohamed Oulmane, Sagarika Mukesh, Phil Stopford, Karthik Yogendra, Lawrence Melvin
Proceedings Volume 11329, 113290H (2020) https://doi.org/10.1117/12.2551731
KEYWORDS: Defect inspection, Etching, Photoresist materials, Photomasks, Stochastic processes, Dielectrics, Data modeling, Process modeling, Lithography, Metals

Proceedings Article | 16 October 2019 Presentation
Proceedings Volume 11147, 111470W (2019) https://doi.org/10.1117/12.2539272
KEYWORDS: Stochastic processes, Extreme ultraviolet, Optical lithography, Extreme ultraviolet lithography, Photoresist materials, Etching, Photoresist developing, Lithography, Interfaces, Absorbance

Showing 5 of 7 publications
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