Dr. Uwe A. Griesinger
at Infineon Technologies AG
SPIE Involvement:
Publications (12)

Proceedings Article | 21 June 2006 Paper
Proceedings Volume 6281, 62810H (2006) https://doi.org/10.1117/12.692639
KEYWORDS: Optical proximity correction, Photomasks, Vestigial sideband modulation, Logic, SRAF, Reticles, Resolution enhancement technologies, Manufacturing, Metals, Data storage

Proceedings Article | 27 December 2002 Paper
Martin Tschinkl, Christian Buergel, Uwe Griesinger, Barbara Jeansannetas, Armelle Vix
Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.467429
KEYWORDS: Opacity, Line edge roughness, Coating, Critical dimension metrology, Chemically amplified resists, Photoresist processing, Mask making, Vestigial sideband modulation, Error analysis, Electron beams

Proceedings Article | 1 August 2002 Paper
Uwe Griesinger, Wolfgang Dettmann, Mario Hennig, Jan Heumann, Roderick Koehle, Ralf Ludwig, Martin Verbeek, Mardjan Zarrabian
Proceedings Volume 4754, (2002) https://doi.org/10.1117/12.476982
KEYWORDS: Photomasks, Quartz, Inspection, Semiconducting wafers, Etching, Printing, Phase measurement, Scanning electron microscopy, Phase shifts, Lithography

Proceedings Article | 14 September 2001 Paper
Armin Semmler, Leonhard Mader, Annika Elsner, Roderick Koehle, Uwe Griesinger, Christoph Noelscher
Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435735
KEYWORDS: Photomasks, Etching, Information operations, Critical dimension metrology, Manufacturing, Phase shifting, Chromium, Phase shifts, Lithography, Optical proximity correction

Proceedings Article | 14 September 2001 Paper
Armin Semmler, Annika Elsner, Roderick Koehle, Leonhard Mader, Rainer Pforr, Christoph Noelscher, Christoph Friedrich, Juergen Knobloch, Uwe Griesinger
Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435773
KEYWORDS: Photomasks, Phase shifts, Lithography, Phase shifting, Optical lithography, Optical proximity correction, 3D metrology, Resolution enhancement technologies, 3D image processing, Diffraction

Showing 5 of 12 publications
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