Dr. Jing Su
at ASML San Jose
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Image processing, Photomasks, Machine learning, Source mask optimization, Computational lithography, Optical proximity correction, SRAF, Model-based design

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10451, Photomask Technology
KEYWORDS: Lithography, Data modeling, Image processing, Photomasks, Machine learning, Computational lithography, Optical proximity correction, SRAF, Model-based design

SPIE Journal Paper | August 24, 2017
JM3 Vol. 16 Issue 03
KEYWORDS: Lithography, Neural networks, Convolution, Neurons, Machine learning, Photomasks, Performance modeling, Feature extraction, Convolutional neural networks, Sensors

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Lithography, Convolutional neural networks, Data modeling, Sensors, Feature extraction, Neural networks, Design for manufacturing, Very large scale integration, Photomasks, Machine learning, Convolution, Neurons

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