Dr. Cuiping Zhang
SPIE Involvement:
Publications (4)

Proceedings Article | 28 April 2023 Presentation + Paper
Austin Peng, Christopher Kaplan, Jeff Lu, Michael Crouse, Zuanyi Li, Xiaobo Xie, David Rio, Achim Woessner, Alexander Tan, Cuiping Zhang, Xiaoyang Li, Dezheng Sun, Stephen Hsu, Rafael Howell, Joerg Zimmermann
Proceedings Volume 12494, 124940C (2023) https://doi.org/10.1117/12.2657454
KEYWORDS: Source mask optimization, Computational lithography, Nanoimprint lithography, Extreme ultraviolet, Semiconducting wafers, Scanners, Modeling, Reticles, Artificial intelligence, Light sources and illumination

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12494, 124940B (2023) https://doi.org/10.1117/12.2658508
KEYWORDS: Stochastic processes, Data modeling, Optical proximity correction, Line width roughness, Source mask optimization, Computational lithography, Semiconducting wafers, Modeling, Performance modeling, Photons

Proceedings Article | 20 March 2018 Presentation + Paper
Proceedings Volume 10587, 105870G (2018) https://doi.org/10.1117/12.2297397
KEYWORDS: Photomasks, Source mask optimization, Optical proximity correction, Lithography, SRAF, Semiconducting wafers, Printing, Electroluminescence, Scanning electron microscopy, Pattern recognition

Proceedings Article | 16 October 2017 Presentation + Paper
Shibing Wang, Jing Su, Quan Zhang, Weichun Fong, Dezheng Sun, Stanislas Baron, Cuiping Zhang, Chenxi Lin, Been-Der Chen, Rafael Howell, Stephen Hsu, Larry Luo, Yi Zou, Yen-Wen Lu, Yu Cao
Proceedings Volume 10451, 104510D (2017) https://doi.org/10.1117/12.2283493
KEYWORDS: SRAF, Machine learning, Lithography, Photomasks, Optical proximity correction, Model-based design, Computational lithography, Data modeling, Image processing

  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top