Minjong Hong
SPIE Involvement:
Publications (4)

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11326, 113260I (2020) https://doi.org/10.1117/12.2551697
KEYWORDS: Machine learning, Neural networks, Lithography, Data modeling, Diffusion, Performance modeling, Image processing, Photomasks, Optical transfer functions, Image resolution

Proceedings Article | 23 March 2011 Paper
Proceedings Volume 7973, 79731C (2011) https://doi.org/10.1117/12.882814
KEYWORDS: Photomasks, Lithography, Optical proximity correction, Manufacturing, SRAF, Image segmentation, Inverse problems, Optimization (mathematics), Electronics, Electroluminescence

Proceedings Article | 19 May 2008 Paper
Kyoil Koo, Sooryong Lee, Jason Hwang, Daniel Beale, Matt St. John, Robert Lugg, Seunghee Baek, Munhoe Do, Junghoe Choi, Youngchang Kim, Minjong Hong
Proceedings Volume 7028, 70283E (2008) https://doi.org/10.1117/12.793122
KEYWORDS: Photomasks, Etching, Optical proximity correction, Data modeling, Semiconducting wafers, Lithography, Statistical modeling, Wafer-level optics, Process modeling, Particles

Proceedings Article | 23 June 2000 Paper
Myoung-Soo Kim, Jae-Hak Choi, Chi Rho, Min-Jong Hong, Bum-Jin Jun, Myung-Goon Gil, Bong-Ho Kim, Dong-Jun Ahn, Matthew Ross, Selmer Wong
Proceedings Volume 3999, (2000) https://doi.org/10.1117/12.388365
KEYWORDS: Electron beams, Etching, Deep ultraviolet, Photoresist processing, Photoresist materials, Refraction, Semiconducting wafers, Metals, FT-IR spectroscopy, Chemical analysis

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