PROCEEDINGS VOLUME 6109
MOEMS-MEMS 2006 MICRO AND NANOFABRICATION | 21-27 JANUARY 2006
Micromachining and Microfabrication Process Technology XI
IN THIS VOLUME

0 Sessions, 26 Papers, 0 Presentations
Devices I  (2)
Devices II  (7)
MOEMS-MEMS 2006 MICRO AND NANOFABRICATION
21-27 January 2006
San Jose, California, United States
Devices I
Proc. SPIE 6109, Injection molded microfluidic devices for biological sample separation and detection, 610901 (23 January 2006); doi: 10.1117/12.648135
Proc. SPIE 6109, Nanofabrication of electrochemical planar probes for single cell analysis, 610902 (23 January 2006); doi: 10.1117/12.648950
Devices II
Proc. SPIE 6109, Fabrication of three-dimensional near-IR photonic crystals using deep-UV contact photolithography and silicon micromachining, 610903 (23 January 2006); doi: 10.1117/12.647154
Proc. SPIE 6109, Assembled Fourier transform micro-spectrometer, 610904 (23 January 2006); doi: 10.1117/12.643872
Proc. SPIE 6109, A polymer-based Fabry-Perot filter integrated with 3-D MEMS structures, 610905 (23 January 2006); doi: 10.1117/12.645076
Proc. SPIE 6109, An optical scanner based on electromagnetically actuated optical fiber, 610906 (23 January 2006); doi: 10.1117/12.646846
Proc. SPIE 6109, Enhancement of structural stiffness in MEMS structures, 610907 (23 January 2006); doi: 10.1117/12.648409
Proc. SPIE 6109, Process design and tracking support for MEMS, 610908 (23 January 2006); doi: 10.1117/12.644486
Proc. SPIE 6109, Fabrication of integrated light guiding plate for backlight system, 610909 (23 January 2006); doi: 10.1117/12.647115
Fabrication Techniques I
Proc. SPIE 6109, Advancing three-dimensional MEMS by complimentary laser micromanufacturing, 61090A (23 January 2006); doi: 10.1117/12.641244
Proc. SPIE 6109, Microstereolithography production of integrated Hadamard mask structures, 61090B (23 January 2006); doi: 10.1117/12.646417
Proc. SPIE 6109, Optical analysis of scanning microstereolithography systems, 61090C (23 January 2006); doi: 10.1117/12.645856
Fabrication Techniques II
Proc. SPIE 6109, High aspect ratio plasma etching of bulk lead zirconate titanate, 61090D (23 January 2006); doi: 10.1117/12.657751
Proc. SPIE 6109, Fabrication of micro-chambers and enclosures using synchronous localized electro-deposition, 61090E (23 January 2006); doi: 10.1117/12.645835
Proc. SPIE 6109, Enhancing filling of interconnect deep trenches using forced convection magneto-electroplating, 61090F (23 January 2006); doi: 10.1117/12.646352
Proc. SPIE 6109, Anisotropic etching of single crystalline SiC using molten KOH for SiC bulk micromachining, 61090G (23 January 2006); doi: 10.1117/12.647116
Metrology and Test
Proc. SPIE 6109, Zero-crossing edge detection for visual force measurement in assembly of MEMS devices, 61090H (23 January 2006); doi: 10.1117/12.646991
Proc. SPIE 6109, Endpoint detection method for time division multiplex etch processes, 61090I (23 January 2006); doi: 10.1117/12.646498
Proc. SPIE 6109, Combined low-coherence interferometry and spectrally resolved reflectometry for nondestructive characterization of small-diameter high-aspect ratio micro-fabricated and micro-machined structures and multilayer membranes, 61090J (23 January 2006); doi: 10.1117/12.639267
Proc. SPIE 6109, On the out-of-plane deformation of freestanding micro-rings for tensile stress measurements, 61090K (23 January 2006); doi: 10.1117/12.641154
Poster Session
Proc. SPIE 6109, Ni-electroplating of double-width micro-cantilever, 61090L (23 January 2006); doi: 10.1117/12.637455
Proc. SPIE 6109, Investigation on overplating high-aspect-ratio microstructure, 61090M (23 January 2006); doi: 10.1117/12.643650
Proc. SPIE 6109, Characterization of nonlinear optical polymers fabricated from dye doped UV curing epoxy, 61090N (23 January 2006); doi: 10.1117/12.644423
Proc. SPIE 6109, A curled-hinge comb micro-mirror using CMOS-MEMS process, 61090O (23 January 2006); doi: 10.1117/12.645214
Proc. SPIE 6109, 5~10 GHz surface acoustic wave resonators and low-loss wide band filters using submicron fabrication technology, 61090P (23 January 2006); doi: 10.1117/12.645639
Proc. SPIE 6109, Development of fabrication techniques for high-density integrated MIM capacitors in power conversion equipment, 61090Q (23 January 2006); doi: 10.1117/12.646121
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