Dr. Florian Delachat
at CEA-LETI
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 26 March 2019 Paper
F. Delachat, H. Teyssedre, L. Pain, X. Chevalier, Célia Nicolet, Christophe Navarro
Proceedings Volume 10958, 1095816 (2019) https://doi.org/10.1117/12.2515607
KEYWORDS: Semiconducting wafers, Nanoimprint lithography, Adhesives, Ultraviolet radiation, Silicon, Thin films, Etching, Coating

Proceedings Article | 19 September 2018 Paper
H. Teyssedre, P. Quemere, J. Chartoire, L. Perraud, F. Delachat, F. Boudaa, M. May
Proceedings Volume 10775, 107750A (2018) https://doi.org/10.1117/12.2326106
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Nanoimprint lithography, Calibration, Manufacturing, Silicon, Lithography, Coating, Data modeling, Scanning electron microscopy

Proceedings Article | 20 March 2018 Presentation + Paper
F. Delachat, M. May, F. Boudaa, H. Teyssedre, J. Chartoire, P. Quemere, L. Perraud
Proceedings Volume 10588, 1058807 (2018) https://doi.org/10.1117/12.2299326
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Nanoimprint lithography, Manufacturing, Metrology, Photoresist processing, Silicon, Data modeling, Coating, Scanning electron microscopy

Proceedings Article | 19 March 2018 Presentation
Proceedings Volume 10586, 105860X (2018) https://doi.org/10.1117/12.2297480
KEYWORDS: Scattering, X-rays, Directed self assembly, Integrated circuits, Optical lithography, Etching, 3D acquisition, 3D modeling

Proceedings Article | 19 March 2018 Presentation
Ahmed Gharbi, Florian DELACHAT, Patricia Pimenta-Barros, Gaëlle Chamiot-Maitral, Maxime Argoud, Celine Lapeyre, Laurent Pain, Raluca Tiron, Christophe Navarro, Célia Nicolet, Ian Cayrefourcq
Proceedings Volume 10584, 105840D (2018) https://doi.org/10.1117/12.2297422
KEYWORDS: Directed self assembly, Optical lithography, Critical dimension metrology, Silicon, Oxides, Semiconducting wafers, Semiconductors, Materials processing, Photomasks, Photoresist processing

Showing 5 of 11 publications
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