Dr. Yuriy Y. Platonov Profile

Dr. Yuriy Y. Platonov

Scientist at Rigaku Innovative Technologies Inc

SPIE Involvement:

Conference Program Committee | Author

Publications (39)

Proceedings Article | 26 March 2019 Paper

High-precision MoSi multilayer coatings at high-volume for continued EUVL infrastructure development

Michael Kriese, Yang Li, Jeffery Steele, Yuriy Platonov

Proceedings Volume 10957, 109571I (2019) https://doi.org/10.1117/12.2514989

KEYWORDS: Multilayers, Extreme ultraviolet, Reflectivity, Extreme ultraviolet lithography, Chromium, Scattering, Optical coatings, EUV optics, Reflection

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Proceedings Article | 16 October 2017 Paper

High-precision MoSi multilayer coatings for radial and 2D designs on curved optics

Michael Kriese, Yang Li, Yuriy Platonov

Proceedings Volume 10450, 1045025 (2017) https://doi.org/10.1117/12.2281646

KEYWORDS: Multilayers, Optical spheres, Optical coatings, Optical design, EUV optics, Aspheric lenses, Extreme ultraviolet lithography, Optical arrays, Aspheric optics, Modulation

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The development of industrial infrastructure for EUV lithography requires a wide array of optics beyond the mask and the scanner optics, which include optics for critical instruments such as exposure testing and actinic inspection. This paper will detail recent results in the production of a variety of high-precision multilayer coatings achieved to support this development. It is critical that the optical designs factor in the capabilities of the achievable multilayer gradients and the associated achievable precision, including impact to surface distortion from the added figure error of the multilayer coating, which adds additional requirements of a specific shape to the period distribution. For example, two different coatings may achieve a ±0.2% variation in multilayer period, but have considerably different added figure error. Part I of the paper will focus on radially-symmetric spherical and aspherical optics. Typical azimuthal uniformity (variation at a fixed radius) achieved is less than ±0.005nm total variation, including measurement precision, on concave optics up to 200mm diameter. For highly curved convex optics (radius of curvature less than 50mm), precision is more challenging and the total variation increases to ±0.01nm total variation for optics 10-30mm in diameter. Total added figure error achieved has been as low as 0.05nm. Part II of the paper will focus on multilayer designs graded in two directions, rather than radially, in order to accommodate the increased complexity of elliptical, toroidal and hyperbolic surfaces. In most cases, the symmetry of the required multilayer gradient does not match the symmetry of the optical surface, and this interaction must be countered via the process design. Achieving such results requires additional flexibility in the design of the deposition equipment, and will be discussed with several examples in the paper, such as the use of variable velocity of an inline substrate carrier in conjunction with a shaped target aperture to produce ±0.03nm total variation on an off-axis elliptical surface.

Proceedings Article | 26 August 2015 Paper

Beam conditioning multilayer optics for laboratory x-ray sources

Yuriy Platonov, Boris Verman, Licai Jiang, Bonglea Kim

Proceedings Volume 9590, 95900B (2015) https://doi.org/10.1117/12.2196352

KEYWORDS: Multilayers, X-ray optics, Reflectivity, Mirrors, Optics manufacturing, X-rays, X-ray sources, Optical design, Crystals, Grazing incidence

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Proceedings Article | 16 March 2015 Paper

Development and evaluation of interface-stabilized and reactive-sputtered oxide-capped multilayers for EUV lithography

Michael Kriese, Yuriy Platonov, Jim Rodriguez, Gary Fournier, Steven Grantham, Charles Tarrio, John Curry, Shannon Hill, Thomas Lucatorto

Proceedings Volume 9422, 94220K (2015) https://doi.org/10.1117/12.2085934

KEYWORDS: Multilayers, Reflectivity, Extreme ultraviolet lithography, Extreme ultraviolet, Annealing, Resistance, Oxides, Reflectometry, Silicon, Oxidation

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Proceedings Article | 17 April 2014 Paper

Improved measurement capabilities at the NIST EUV reflectometry facility

C. Tarrio, S. Grantham, T. Germer, J. Rife, T. Lucatorto, M. Kriese, Y. Platonov, L. Jiang, J. Rodriguez

Proceedings Volume 9048, 90481I (2014) https://doi.org/10.1117/12.2046290

KEYWORDS: Sensors, Extreme ultraviolet, Reflectometry, Polarization, Radiation effects, Reflectivity, Motion models, EUV optics, 3D modeling, Data modeling

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Proceedings Article | 18 March 2014 Paper

Development of an EUVL collector with infrared radiation suppression

Michael Kriese, Yuriy Platonov, Bodo Ehlers, Licai Jiang, Jim Rodriguez, Ulrich Mueller, Jay Daniel, Shayna Khatri, Adam Magruder, Steven Grantham, Charles Tarrio, Thomas Lucatorto

Proceedings Volume 9048, 90483C (2014) https://doi.org/10.1117/12.2049279

KEYWORDS: Extreme ultraviolet, Reflectivity, Infrared radiation, Extreme ultraviolet lithography, Plasma, Infrared technology, Neodymium, Nickel, Surface finishing, Diffraction gratings

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Proceedings Article | 4 May 2011 Paper

Multilayers for next generation EUVL at 6.X nm

Yuriy Platonov, Jim Rodriguez, Michael Kriese, Eric Gullikson, Tetsuo Harada, Takeo Watanabe, Hiroo Kinoshita

Proceedings Volume 8076, 80760N (2011) https://doi.org/10.1117/12.889519

KEYWORDS: Reflectivity, Extreme ultraviolet lithography, Lanthanum, Multilayers, Extreme ultraviolet, Mirrors, Sputter deposition, Laser beam diagnostics, Boron, X-ray optics

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Proceedings Article | 4 May 2011 Paper

Problem of roughness detection for supersmooth surfaces

M. Barysheva, B. Gribkov, Yu. Vainer, M. Zorina, A. Pestov, Y. Platonov, D. Rogachev, N. Salashchenko, N. Chkhalo

Proceedings Volume 8076, 80760M (2011) https://doi.org/10.1117/12.886470

KEYWORDS: Scattering, Atomic force microscopy, X-rays, Spatial frequencies, Etching, Reflectometry, Light scattering, Multilayers, Hard x-rays, Silica

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Proceedings Article | 3 September 2008 Paper

Surface roughness analysis of multilayer x-ray optics

Vladimir Martynov, Yuriy Platonov

Proceedings Volume 7077, 707704 (2008) https://doi.org/10.1117/12.791525

KEYWORDS: Multilayers, Semiconducting wafers, X-ray optics, Atomic force microscopy, X-rays, Spatial frequencies, Microscopes, Coating, Scattering, Wafer-level optics

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Proceedings Article | 3 September 2008 Paper

Multilayers and crystal for a multi-bandpass monochromator

Renfei Feng, Yuriy Platonov, David Broadway, Gene Ice, Andrea Gerson, Stewart McIntyre

Proceedings Volume 7077, 70771Y (2008) https://doi.org/10.1117/12.806344

KEYWORDS: Crystals, Reflectivity, Monochromators, Multilayers, X-rays, Light sources, Diffraction, Laser crystals, Molybdenum, Atomic force microscopy

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Proceedings Article | 20 September 2007 Paper

Deposition and analysis of small d-spacing depth graded multilayer structures

David Broadway, Yuriy Platonov, Roberto Mancini, Riccardo Tommasini

Proceedings Volume 6705, 67050A (2007) https://doi.org/10.1117/12.735595

KEYWORDS: Reflectivity, Molybdenum, Diffusion, Structural design, Sputter deposition, Coating, Argon, Convolution, Satellites, Physics

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Proceedings Article | 6 May 2005 Paper

Characterization of prototype optical surfaces and coatings for the EUV reticle imaging microscope

H. Glatzel, J. Daniel, K. Khajehnouri, T. Roff, S. Sporer, S. Wong, M. Kriese, Y. Platonov, J. Rodriguez

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.619290

KEYWORDS: Optical coatings, Reflectivity, Photovoltaics, Extreme ultraviolet, Microscopes, Reticles, Light scattering, Mirrors, Atomic force microscopy, Prototyping

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Proceedings Article | 3 November 2004 Paper

Optimization and analysis of depth-graded multilayer structures

David Broadway, Yuriy Platonov, Vladimir Martynov, Pao-Kuang Kuo

Proceedings Volume 5537, (2004) https://doi.org/10.1117/12.561446

KEYWORDS: Reflectivity, Multilayers, Annealing, Sputter deposition, Diffusion, X-rays, Nickel, Coating, Convolution, Temperature metrology

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Proceedings Article | 3 November 2004 Paper

High spectral resolution Al2O3/B4C, SiC/Si, SiC/B4C, and SiC/C multilayer structures for the photon energies of 6 keV to 19 keV

Yuriy Platonov, Vladimir Martynov, Alexander Kazimirov, Barry Lai

Proceedings Volume 5537, (2004) https://doi.org/10.1117/12.558740

KEYWORDS: Multilayers, Reflectivity, Monochromators, Spectral resolution, X-rays, Silicon, Optical testing, Sputter deposition, Beam splitters, X-ray characterization

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Proceedings Article | 13 January 2004 Paper

Replicated multilayer x-ray mirrors

Ladislav Pina, Adolf Inneman, Rene Hudec, Hana Ticha, Yuriy Platonov

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.507975

KEYWORDS: X-rays, Reflectivity, Mirrors, Multilayers, Glasses, X-ray optics, X-ray astronomy, X-ray technology, Silicon, Coating

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Proceedings Article | 23 December 2003 Paper

High selective x-ray multilayers

Vladimir Martynov, Yuriy Platonov, Alexander Kazimirov, Donald Bilderback

Proceedings Volume 5195, (2003) https://doi.org/10.1117/12.502709

KEYWORDS: Multilayers, Reflectivity, Spectral resolution, Aluminum, X-rays, Crystals, Ions, Monochromators, Deposition processes, Spatial resolution

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Proceedings Article | 17 December 2003 Paper

Initial results of new photomask-blank deposition tool

Michael Kriese, James Rodriguez, Yuriy Platonov, James Wood

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518314

KEYWORDS: Multilayers, Photomasks, Extreme ultraviolet, Thin films, Thin film coatings, Ions, Particles, Reflectivity, Ion beams, Sputter deposition

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Proceedings Article | 24 December 2002 Paper

Fabry-Perot interferometer in x rays

Vladimir Martynov, Yuriy Platonov

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.451344

KEYWORDS: Fabry–Perot interferometry, X-rays, Reflectivity, Interferometers, Multilayers, Mirrors, X-ray technology, Grazing incidence, Thin film deposition, X-ray optics

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Proceedings Article | 24 December 2002 Paper

Status of small d-spacing x-ray multilayer development at Osmic

Yuriy Platonov, Luis Gomez, David Broadway

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.451345

KEYWORDS: Reflectivity, Crystals, X-rays, Multilayers, Spectrometers, Spectral resolution, Ion beams, Aluminum, Positron emission tomography, X-ray fluorescence spectroscopy

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Proceedings Article | 3 May 2002 Paper

X-ray imaging of micro-objects using dark field refraction-contrast method with resonantly absorbing multilayer mirrors

Vladimir Protopopov, Jaroslav Sobota, Anton Tremsin, Oswald Siegmund, Yuriy Platonov

Proceedings Volume 4682, (2002) https://doi.org/10.1117/12.465569

KEYWORDS: Mirrors, Sensors, Absorption, X-rays, Signal detection, Refraction, Spatial resolution, Microchannel plates, Radiography, Laser beam diagnostics

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Proceedings Article | 5 January 2001 Paper

Controlling thin film thickness distribution in two dimensions

David Broadway, Michael Kriese, Yuriy Platonov

Proceedings Volume 4145, (2001) https://doi.org/10.1117/12.411623

KEYWORDS: Coating, Thin films, Spherical lenses, Sputter deposition, Chemical species, Data modeling, Process control, Thin film deposition, Geometrical optics, Reflectors

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Proceedings Article | 23 November 1999 Paper

Progress in the development of three-aspherical mirror optics for EUVL

Hiroo Kinoshita, Takeo Watanabe, Daniel Bajuk, Jay Daniel, Yachiyo Kimpara, Michael Kriese, Yuriy Platonov

Proceedings Volume 3767, (1999) https://doi.org/10.1117/12.371114

KEYWORDS: Mirrors, Extreme ultraviolet lithography, Multilayers, Reflectivity, Coating, Surface finishing, Polishing, Phase interferometry, Interferometers, Semiconducting wafers

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Proceedings Article | 23 November 1999 Paper

Control of Mo/Si multilayers for soft x-ray performance

Michael Kriese, Gary Fournier, James Rodriguez, Yuriy Platonov

Proceedings Volume 3767, (1999) https://doi.org/10.1117/12.371123

KEYWORDS: X-rays, Optical coatings, Multilayers, Extreme ultraviolet lithography, Semiconducting wafers, Reflectivity, Photomasks, X-ray optics, Sputter deposition, Process control

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Proceedings Article | 29 September 1999 Paper

Achieving desired thickness gradients on flat and curved substrates

David Broadway, Yuriy Platonov, Luis Gomez

Proceedings Volume 3766, (1999) https://doi.org/10.1117/12.363643

KEYWORDS: Mathematical modeling, Chemical species, X-ray optics, Silicon, Sputter deposition, Particles, Reflectivity, Thin film deposition, Thin films, Thin film coatings

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Proceedings Article | 29 September 1999 Paper

Normal-incidence condenser mirror arrangement for compact water-window x-ray microscopy

Hans Hertz, Lars Rymell, Magnus Berglund, Goeran Johansson, Thomas Wilhein, Yuriy Platonov, David Broadway

Proceedings Volume 3766, (1999) https://doi.org/10.1117/12.363641

KEYWORDS: Mirrors, Reflectivity, Spherical lenses, Microscopes, X-ray microscopy, X-rays, Plasmas, Zone plates, Charge-coupled devices, X-ray optics

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Proceedings Article | 13 November 1998 Paper

Design of a LIGA beamline using a multilayer-coated reflection mirror

Hiroo Kinoshita, Yachiyo Kimpara, T. Uruga, Takeo Watanabe, Masahito Niibe, Yuriy Platonov, James Wood

Proceedings Volume 3447, (1998) https://doi.org/10.1117/12.331117

KEYWORDS: Mirrors, Reflectivity, Multilayers, Platinum, Coating, X-rays, Reflection, X-ray lithography, Silicon carbide, X-ray optics

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Proceedings Article | 5 June 1998 Paper

Three-aspherical-mirror system for EUV lithography

Hiroo Kinoshita, Takeo Watanabe, Masahito Niibe, Masaaki Ito, H. Oizumi, Hiromasa Yamanashi, Katsuhiko Murakami, Tetsuya Oshino, Yuriy Platonov, Nicola Grupido

Proceedings Volume 3331, (1998) https://doi.org/10.1117/12.309580

KEYWORDS: Semiconducting wafers, Wafer-level optics, Photomasks, Optical alignment, Mirrors, Extreme ultraviolet lithography, Synchrotron radiation, Tolerancing, Assembly tolerances, Optical design

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Proceedings Article | 1 November 1997 Paper

Deposition of x-ray multilayers on long-size substrates for synchrotron applications

Yuriy Platonov, David Broadway, Brian DeGroot, Boris Verman, Bonglea Kim, George Gutman, James Wood, James Rodriguez, Nicola Grupido

Proceedings Volume 3152, (1997) https://doi.org/10.1117/12.295561

KEYWORDS: Multilayers, Mirrors, Reflectivity, Coating, Silicon, X-rays, Silicon carbide, Angiography, Synchrotrons, Sputter deposition

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Proceedings Article | 15 October 1997 Paper

Development of grazing incidence multilayer mirrors for hard x-ray focusing telescopes

Peter Mao, Fiona Harrison, Yuriy Platonov, David Broadway, Brian DeGroot, Finn Christensen, William Craig, Charles Hailey

Proceedings Volume 3114, (1997) https://doi.org/10.1117/12.283791

KEYWORDS: Multilayers, Glasses, Reflectivity, Mirrors, Hard x-rays, X-ray telescopes, Thin film coatings, Optical coatings, Sputter deposition, Grazing incidence

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Proceedings Article | 11 July 1997 Paper

X-ray reflectivity and mechanical stress in W/Si multilayers deposited on thin substrates of glass, epoxy-replicated aluminum foil, and Si wafer

Yuriy Platonov, David Broadway, Brian DeGroot, Peter Mao, Fiona Harrison, George Gutman, James Rodriguez

Proceedings Volume 3113, (1997) https://doi.org/10.1117/12.278878

KEYWORDS: Multilayers, Reflectivity, Silicon, Glasses, Annealing, X-rays, Tungsten, Temperature metrology, Semiconducting wafers, Aluminum

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Proceedings Article | 10 June 1996 Paper

X-ray diffuse scattering in multilayer nanostructures

Anatoli Andreev, Yu Ponomarev, Yuriy Platonov, Nikolai Salashchenko

Proceedings Volume 2801, (1996) https://doi.org/10.1117/12.242148

KEYWORDS: Scattering, Mirrors, Diffraction, X-rays, Reflection, Computer simulations, Interfaces, Nanostructures, Kinematics, Optical testing

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Proceedings Article | 25 September 1995 Paper

Laser plasma source of polarized monochromatic beams in the XUV around multilayer mirrors

Eugene Ragozin, Nikolai Kolachevsky, Mikhail Mitropolsky, Yurii Pokrovsky, Alexander Shevelko, A. Vasil'ev, Yuriy Platonov, Nikolai Salashchenko

Proceedings Volume 2520, (1995) https://doi.org/10.1117/12.221646

KEYWORDS: Mirrors, Plasma, X-rays, Reflectivity, Spectroscopy, Polarizers, Polarization, Extreme ultraviolet, Solids, X-ray optics

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Proceedings Article | 1 February 1994 Paper

Normal incidence imaging multilayer x-ray mirrors with the periods of nanometer and subnanometer scale

Nikolai Salashchenko, Sergey Gaponov, A. Akhsakhaljan, S. Andreev, Yuriy Platonov, Nicolay Polushkin, E. Shamov, S. Shinkarev, S. Zuev

Proceedings Volume 2011, (1994) https://doi.org/10.1117/12.167234

KEYWORDS: Reflectivity, X-rays, Crystals, Mirrors, Spherical lenses, Modulation, Interfaces, Diffraction, X-ray imaging, Plasma

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Proceedings Article | 1 February 1994 Paper

Multilayer mirrors and filters for soft x-ray spectroscopy of a high-temperature plasma

Yuriy Platonov, Sergei Bobashev, Nikolai Salashchenko, Dmitrii Simanovski, L. Shmaenok, S. Zuev

Proceedings Volume 2011, (1994) https://doi.org/10.1117/12.167235

KEYWORDS: X-rays, Plasma, Optical filters, Mirrors, Spherical lenses, Reflectivity, Metals, Monochromators, Pulsed laser operation, Sensors

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Proceedings Article | 10 June 1992 Paper

Small d-spacing multilayer structures for the photon energy range E > 0.3 keV

S. Andreev, B. Mueller, Yuriy Platonov, Nicolay Polushkin, Nikolai Salashchenko, Franz Schaefers, S. Shinkarev, Dmitrii Simanovski, S. Zuev

Proceedings Volume 1800, (1992) https://doi.org/10.1117/12.60679

KEYWORDS: Reflectivity, X-rays, Diffraction, Plasma, Crystals, Spherical lenses, Modulation, X-ray optics, Interfaces, Mirrors

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Proceedings Article | 10 June 1992 Paper

Intensive laser plasma source of quasimonochromatized soft x-ray radiation with focusing multilayer mirrors

Sergei Bobashev, A. Golubev, D. Mosesyan, Yuriy Platonov, Nikolai Salashchenko, Dmitrii Simanovski, Anatoley Sorokin, L. Shmaenok

Proceedings Volume 1800, (1992) https://doi.org/10.1117/12.60676

KEYWORDS: Plasma, Gold, Pulsed laser operation, X-rays, Sensors, Spherical lenses, Laser energy, Reflectivity, Mirrors, Annealing

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Proceedings Article | 10 June 1992 Paper

Focusing of picosecond x-ray pulses on the target at power densities up to 1 GW cm-2

Sergei Akhmanov, I. Bayanov, Sergey Gaponov, Vyacheslav Gordienko, M. Djidjoev, S. Krayushkin, S. Magnitskii, V. Platonenko, Yuriy Platonov, Yu Ponomarev, Andrey Savel'ev, Nikolai Salashchenko, E. Slobodchikov, A. Tarasevitch

Proceedings Volume 1800, (1992) https://doi.org/10.1117/12.60673

KEYWORDS: X-rays, Picosecond phenomena, Ions, Femtosecond phenomena, Plasma, Pulsed laser operation, X-ray sources, Spherical lenses, Boron, Multilayers

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Proceedings Article | 1 June 1992 Paper

Soft x-ray production and harmonic generation in femtosecond laser-driven plasma

Andrey Savel'ev, Sergei Akhmanov, I. Bayanov, Sergey Gaponov, Vyacheslav Gordienko, M. Djidjoev, S. Krayushkin, S. Magnitskii, V. Platonenko, Yuriy Platonov, Yu Ponomarev, Nikolai Salashchenko, E. Slobodchikov, A. Tarasevitch

Proceedings Volume 1627, (1992) https://doi.org/10.1117/12.60175

KEYWORDS: X-rays, Harmonic generation, Femtosecond phenomena, Plasma

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Proceedings Article | 1 December 1991 Paper

Spectrum investigation and imaging of laser-produced plasma by multilayer x-ray optics

Yuriy Platonov, Nikolai Salashchenko, L. Shmaenok

Proceedings Volume 1440, (1991) https://doi.org/10.1117/12.48150

KEYWORDS: X-rays, Plasma, X-ray optics, Mirrors, X-ray imaging, Reflectivity, Optical components, Optical filters, Spherical lenses, Pulsed laser operation

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Showing 5 of 39 publications

Conference Committee Involvement (29)

Advances in X-Ray/EUV Sources, Optics, and Components XX

3 August 2025 | San Diego, California, United States

EUV and X-ray Optics: Synergy between Laboratory and Space IX

7 April 2025 | Prague, Czech Republic

Advances in X-Ray/EUV Optics and Components XIX

19 August 2024 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XVIII

22 August 2023 | San Diego, California, United States

EUV and X-ray Optics: Synergy between Laboratory and Space VIII

26 April 2023 | Prague, Czech Republic

Advances in X-Ray/EUV Optics and Components XVII

22 August 2022 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XVI

2 August 2021 | San Diego, California, United States

EUV and X-ray Optics, Sources, and Instrumentation

19 April 2021 | Online Only, Czech Republic

Advances in X-Ray/EUV Optics and Components XV

26 August 2020 | Online Only, California, United States

Advances in X-Ray/EUV Optics and Components XIV

14 August 2019 | San Diego, California, United States

EUV and X-ray Optics: Synergy between Laboratory and Space

3 April 2019 | Prague, Czech Republic

Advances in X-Ray/EUV Optics and Components XIII

20 August 2018 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XII

8 August 2017 | San Diego, California, United States

EUV and X-ray Optics: Synergy between Laboratory and Space

26 April 2017 | Prague, Czech Republic

Advances in X-Ray/EUV Optics and Components XI

31 August 2016 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components X

11 August 2015 | San Diego, California, United States

EUV and X-ray Optics: Synergy between Laboratory and Space

13 April 2015 | Prague, Czech Republic

Advances in X-Ray/EUV Optics and Components IX

19 August 2014 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components VIII

26 August 2013 | San Diego, California, United States

EUV and X-ray Optics: Synergy between Laboratory and Space III

17 April 2013 | Prague, Czech Republic

Advances in X-Ray/EUV Optics and Components VII

13 August 2012 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components VI

22 August 2011 | San Diego, California, United States

EUV and X-Ray Optics: Synergy between Laboratory and Space

20 April 2011 | Prague, Czech Republic

Advances in X-Ray/EUV Optics and Components V

2 August 2010 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components IV

3 August 2009 | San Diego, California, United States

EUV and X-ray Optics: Synergy between Laboratory and Space

20 April 2009 | Prague, Czech Republic

Advances in X-Ray/EUV Optics and Components III

11 August 2008 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components II

27 August 2007 | San Diego, California, United States

Advances in X-Ray/EUV Optics, Components, and Applications

14 August 2006 | San Diego, California, United States

Showing 5 of 29 Conference Committees

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