Dr. Yuriy Y. Platonov
Scientist at Rigaku Innovative Technologies Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (38)

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Optical design, Multilayers, Optical spheres, Modulation, Optical coatings, Aspheric optics, Aspheric lenses, Extreme ultraviolet lithography, Optical arrays, EUV optics

PROCEEDINGS ARTICLE | August 26, 2015
Proc. SPIE. 9590, Advances in Laboratory-based X-Ray Sources, Optics, and Applications IV
KEYWORDS: Mirrors, Optical design, Multilayers, X-ray optics, Crystals, X-rays, X-ray sources, Reflectivity, Grazing incidence, Optics manufacturing

PROCEEDINGS ARTICLE | March 16, 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Oxides, Multilayers, Annealing, Silicon, Resistance, Reflectivity, Reflectometry, Extreme ultraviolet, Extreme ultraviolet lithography, Oxidation

PROCEEDINGS ARTICLE | April 17, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Data modeling, Polarization, Sensors, Reflectivity, 3D modeling, Reflectometry, Extreme ultraviolet, Radiation effects, Motion models, EUV optics

PROCEEDINGS ARTICLE | March 18, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Nickel, Reflectivity, Infrared radiation, Extreme ultraviolet, Extreme ultraviolet lithography, Infrared technology, Neodymium, Surface finishing, Plasma, Diffraction gratings

PROCEEDINGS ARTICLE | May 4, 2011
Proc. SPIE. 8076, EUV and X-Ray Optics: Synergy between Laboratory and Space II
KEYWORDS: Mirrors, Multilayers, X-ray optics, Sputter deposition, Reflectivity, Extreme ultraviolet, Boron, Extreme ultraviolet lithography, Lanthanum, Laser beam diagnostics

Showing 5 of 38 publications
Conference Committee Involvement (19)
EUV and X-ray Optics: Synergy between Laboratory and Space
1 April 2019 | Prague, Czech Republic
Advances in X-Ray/EUV Optics and Components XIII
20 August 2018 | San Diego, California, United States
Advances in X-Ray/EUV Optics and Components XII
8 August 2017 | San Diego, California, United States
EUV and X-ray Optics: Synergy between Laboratory and Space
26 April 2017 | Prague, Czech Republic
Advances in X-Ray/EUV Optics and Components XI
31 August 2016 | San Diego, California, United States
Showing 5 of 19 published special sections
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