Dr. Geert Mannaert
at imec
SPIE Involvement:
Publications (14)

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12958, 1295804 (2024) https://doi.org/10.1117/12.3012322
KEYWORDS: Silicon, Etching, Optical lithography, Nanosheets, Passivation, Semiconducting wafers, Superlattices, Germanium, Oxides, Fin field effect transistors

Proceedings Article | 9 April 2024 Presentation + Paper
S. Choudhury, G. Mannaert, L. P. Lima, S. Demuynck, I. Koo, F. Lazzarino
Proceedings Volume 12958, 1295805 (2024) https://doi.org/10.1117/12.3013077
KEYWORDS: Etching, Optical lithography, Silicon, Passivation, Dielectrics, Superlattices, Nanosheets, Cadmium, Field effect transistors, Chemistry

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12499, 1249908 (2023) https://doi.org/10.1117/12.2658073
KEYWORDS: Etching, Silicon, Oxides, Passivation, Plasma etching, Nanosheets

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12056, PC1205608 (2022) https://doi.org/10.1117/12.2615984
KEYWORDS: Optical lithography, Etching, Dielectrics, Silicon, Metals, Wafer bonding, Transistors, Surface roughness, Semiconducting wafers, Photomasks

Proceedings Article | 7 June 2022 Presentation
Proceedings Volume PC12054, PC1205402 (2022) https://doi.org/10.1117/12.2622565
KEYWORDS: Directed self assembly, Extreme ultraviolet lithography, Optical lithography, Extreme ultraviolet, Semiconductors, Semiconducting wafers, Lithography, Light-matter interactions

Showing 5 of 14 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top