Dr. Lucia D'Urzo
at SCREEN SPE Germany GmbH
SPIE Involvement:
Publications (11)

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11612, 116120H (2021) https://doi.org/10.1117/12.2584064
KEYWORDS: Extreme ultraviolet lithography, Particles, Molecules, Lithography, Extreme ultraviolet, Semiconducting wafers, Metals, Liquids, Linear filtering, Coating

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11326, 113261Q (2020) https://doi.org/10.1117/12.2552833
KEYWORDS: Silicon, Particles, Ions, Aluminum, Semiconducting wafers, Scanning electron microscopy, Plasma etching, Lithography

Proceedings Article | 23 March 2020 Presentation + Paper
Lucia D'Urzo, Toru Umeda, Takehito Mizuno, Atsushi Hattori, Rao Varanasi, Amarnauth Singh, Rajan Beera, Philippe Foubert, Jelle Vandereyken, Waut Drent
Proceedings Volume 11326, 113260K (2020) https://doi.org/10.1117/12.2560144
KEYWORDS: Semiconducting wafers, Particles, Extreme ultraviolet lithography, Extreme ultraviolet, Inspection, Bridges, Defect inspection

Proceedings Article | 7 April 2017 Presentation + Paper
Proceedings Volume 10143, 101430U (2017) https://doi.org/10.1117/12.2261741
KEYWORDS: Photoresist materials, Extreme ultraviolet lithography, Photoresist developing, Optical lithography, Extreme ultraviolet, High volume manufacturing, Resolution enhancement technologies, Photomasks, Photoresist processing, Semiconducting wafers, Etching

Proceedings Article | 27 March 2017 Paper
Proceedings Volume 10146, 101462A (2017) https://doi.org/10.1117/12.2258582
KEYWORDS: Lithography, Photoresist materials, Immersion lithography, Semiconducting wafers, Line width roughness, Line edge roughness, Scanning electron microscopy, Particles, Bridges, Finite element methods, Fermium, Frequency modulation

Showing 5 of 11 publications
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