Dr. R. Scott Mackay
Consultant at Petersen Advanced Lithography Inc
SPIE Involvement:
Publications (14)

Proceedings Article | 19 May 2006 Paper
H. Marchman, D. Taylor, S. Hadisutjipto, S. Mackay, R. Cottle, J. Maltabes, J. Brown
Proceedings Volume 6283, 628311 (2006) https://doi.org/10.1117/12.681862
KEYWORDS: Photomasks, Ions, Etching, Ion beams, Lithography, Molecules, Electron beams, Image resolution, Scanning electron microscopy, Signal to noise ratio

Proceedings Article | 9 November 2005 Paper
Proceedings Volume 5992, 59924A (2005) https://doi.org/10.1117/12.632207
KEYWORDS: Lithography, Photomasks, Manufacturing, Semiconductors, Reticles, Etching, Optical lithography, Semiconducting wafers, Nanoimprint lithography, Inspection

Proceedings Article | 7 November 2005 Paper
R. Scott Mackay, Henry Kamberian, Barry Rockwell
Proceedings Volume 5992, 59920S (2005) https://doi.org/10.1117/12.633550
KEYWORDS: Photomasks, Vestigial sideband modulation, Metrology, Lithography, Error analysis, Electron beam lithography, Manufacturing, Composites, Metals, Semiconductors

Proceedings Article | 18 August 2005 Paper
Proceedings Volume 5931, 59311H (2005) https://doi.org/10.1117/12.629499
KEYWORDS: Lithography, Manufacturing, Semiconductors, Photomasks, Etching, Reticles, Microelectromechanical systems, Optical lithography, Optics manufacturing, Nanotechnology

Proceedings Article | 5 May 2005 Paper
Young Mog Ham, Brian Dillon, Chris Progler, Kory Goldammer, Zhiziang Jin, Gary Green, R. Scott Mackay, Hitendra Divecha, Victor Boksha, Pat Martin, Mitch Heins, Yuan Zhang, Kurt Davis, Rafik Marutyan, Karen Martirosyan, Sergei Bakarian
Proceedings Volume 5756, (2005) https://doi.org/10.1117/12.600730
KEYWORDS: Photomasks, Semiconducting wafers, Optical proximity correction, Lithography, Critical dimension metrology, Manufacturing, Resolution enhancement technologies, Electron beam lithography, Mask making, Design for manufacturing

Showing 5 of 14 publications
Proceedings Volume Editor (3)

SPIE Conference Volume | 6 May 2005

SPIE Conference Volume | 20 May 2004

SPIE Conference Volume | 16 June 2003

Conference Committee Involvement (9)
Alternative Lithographic Technologies III
1 March 2011 | San Jose, California, United States
Alternative Lithographic Technologies II
23 February 2010 | San Jose, California, United States
Alternative Lithographic Technologies
24 February 2009 | San Jose, California, United States
Emerging Lithographic Technologies XII
26 February 2008 | San Jose, California, United States
Emerging Lithographic Technologies XI
27 February 2007 | San Jose, California, United States
Showing 5 of 9 Conference Committees
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