Dr. R. Scott Mackay
Consultant at Petersen Advanced Lithography Inc
SPIE Involvement:
Conference Program Committee | Conference Chair | Conference Co-Chair | Author
Publications (17)

PROCEEDINGS ARTICLE | May 19, 2006
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Signal to noise ratio, Lithography, Electron beams, Etching, Molecules, Ions, Image resolution, Scanning electron microscopy, Ion beams, Photomasks

PROCEEDINGS ARTICLE | November 9, 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Semiconductors, Lithography, Reticles, Optical lithography, Etching, Manufacturing, Inspection, Photomasks, Nanoimprint lithography, Semiconducting wafers

PROCEEDINGS ARTICLE | November 7, 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Semiconductors, Lithography, Electron beam lithography, Metrology, Metals, Error analysis, Composites, Manufacturing, Photomasks, Vestigial sideband modulation

PROCEEDINGS ARTICLE | August 18, 2005
Proc. SPIE. 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II
KEYWORDS: Microelectromechanical systems, Semiconductors, Nanotechnology, Lithography, Reticles, Optical lithography, Etching, Manufacturing, Photomasks, Optics manufacturing

SPIE Conference Volume | May 6, 2005

PROCEEDINGS ARTICLE | May 5, 2005
Proc. SPIE. 5756, Design and Process Integration for Microelectronic Manufacturing III
KEYWORDS: Lithography, Electron beam lithography, Manufacturing, Design for manufacturing, Photomasks, Optical proximity correction, Mask making, Critical dimension metrology, Semiconducting wafers, Resolution enhancement technologies

Showing 5 of 17 publications
Conference Committee Involvement (9)
Alternative Lithographic Technologies III
1 March 2011 | San Jose, California, United States
Alternative Lithographic Technologies II
23 February 2010 | San Jose, California, United States
Alternative Lithographic Technologies
24 February 2009 | San Jose, California, United States
Emerging Lithographic Technologies XII
26 February 2008 | San Jose, California, United States
Emerging Lithographic Technologies XI
27 February 2007 | San Jose, California, United States
Showing 5 of 9 published special sections
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top