Frank Laske
Projectmanager at KLA MIE GmbH
SPIE Involvement:
Author
Publications (37)

Proceedings Article | 16 September 2022 Paper
P. Y. Portnichenko, F. Oezdogan, L. Dawahre, O. Lohse, B. Kalsbeck, P. Jain, H. Steigerwald, S. Ismail, F. Laske
Proceedings Volume 12325, 123250E (2022) https://doi.org/10.1117/12.2642100
KEYWORDS: Photomasks, Inspection, Extreme ultraviolet, Metrology, Reticles, Optical alignment, Particles, Manufacturing, Defect inspection

Proceedings Article | 13 June 2022 Presentation
Stefan Eyring, Deepak Selvanathan, William Blanton, Nimrod Shuall, Frank Laske
Proceedings Volume PC12053, PC120530P (2022) https://doi.org/10.1117/12.2626772
KEYWORDS: Overlay metrology, Scanning electron microscopy, Electron microscopes, Multilayers, Measurement devices, Databases

Proceedings Article | 20 October 2021 Presentation + Paper
P. Portnichenko, F. Oezdogan, L. Dawahre, O. Lohse, B. Kalsbeck, P. Jain, H. Steigerwald, S. Ismail, F. Laske
Proceedings Volume 11855, 1185504 (2021) https://doi.org/10.1117/12.2600957
KEYWORDS: Photomasks, Inspection, Extreme ultraviolet, Metrology, Reticles, Optical alignment, Particles, Manufacturing, Defect inspection, Silicon

Proceedings Article | 22 February 2021 Presentation + Paper
S. Czerkas, N. Gutman, R. Gronheid, E. Gurevich, R. Wang, Y. Feler, M. Zaberchik, Y. Grauer, H. Stoschus, Y. Uziel, U. Pohlmann, F. Laske
Proceedings Volume 11611, 116110B (2021) https://doi.org/10.1117/12.2583710
KEYWORDS: Overlay metrology, Scanning electron microscopy, Inspection, Electron microscopes, Optical metrology, Optical lithography, New and emerging technologies, Metrology, Integrated optics, Imaging metrology

Proceedings Article | 20 March 2020 Presentation + Paper
Proceedings Volume 11325, 113251X (2020) https://doi.org/10.1117/12.2551797
KEYWORDS: Scanning electron microscopy, Overlay metrology, Metrology, Calibration, Optical calibration

Showing 5 of 37 publications
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