Jin-Hyung Park
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Publications (10)

Proceedings Article | 23 September 2009 Paper
Proceedings Volume 7488, 748809 (2009) https://doi.org/10.1117/12.830034
KEYWORDS: Photomasks, Inspection, Defect inspection, Lithography, SRAF, Image classification, Wafer-level optics, Semiconducting wafers, Defect detection, Scanning electron microscopy

Proceedings Article | 23 September 2009 Paper
Proceedings Volume 7488, 74882Q (2009) https://doi.org/10.1117/12.830139
KEYWORDS: Inspection, Photomasks, SRAF, Lithography, Defect detection, Reticles, Semiconducting wafers, Image resolution, Image processing, Wafer inspection

Proceedings Article | 16 November 2007 Paper
Proceedings Volume 6730, 67303O (2007) https://doi.org/10.1117/12.747180
KEYWORDS: Inspection, SRAF, Photomasks, Semiconducting wafers, Optical proximity correction, Mask making, Electronics, Critical dimension metrology, Printing, Sensors

Proceedings Article | 25 October 2007 Paper
Proceedings Volume 6730, 673024 (2007) https://doi.org/10.1117/12.746567
KEYWORDS: Inspection, SRAF, Photomasks, Reticles, Optical proximity correction, Defect inspection, Databases, Opacity, Semiconducting wafers, Defect detection

Proceedings Article | 14 May 2007 Paper
Proceedings Volume 6607, 660717 (2007) https://doi.org/10.1117/12.728956
KEYWORDS: Inspection, Lamps, Photomasks, Deep ultraviolet, Defect detection, SRAF, Particles, Defect inspection, Manufacturing, Resolution enhancement technologies

Showing 5 of 10 publications
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