J. Fung Chen
GM at Applied Maerials
SPIE Involvement:
Publications (93)

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12957, 129570X (2024) https://doi.org/10.1117/12.3010203
KEYWORDS: Lithography, Packaging, Polyimides, Materials properties, Electrical properties, Dielectrics, Image processing, Film thickness, Chemical mechanical planarization, Advanced packaging

Proceedings Article | 19 May 2008 Paper
Proceedings Volume 7028, 70280X (2008) https://doi.org/10.1117/12.793039
KEYWORDS: 3D modeling, Optical proximity correction, Calibration, Photomasks, Data modeling, Semiconducting wafers, Performance modeling, Finite element methods, Lithography, Wafer-level optics

Proceedings Article | 12 March 2008 Paper
Proceedings Volume 6924, 69241C (2008) https://doi.org/10.1117/12.773060
KEYWORDS: Optical proximity correction, Extreme ultraviolet, Computational lithography, Photomasks, Lithography, Calibration, Extreme ultraviolet lithography, Manufacturing, Resolution enhancement technologies, Polarization

Proceedings Article | 4 April 2007 Paper
Proceedings Volume 6518, 65180A (2007) https://doi.org/10.1117/12.713867
KEYWORDS: Calibration, Optical proximity correction, Data modeling, Photomasks, Imaging systems, Mathematical modeling, Design for manufacturing, Statistical modeling, Lithography, Image processing

Proceedings Article | 20 October 2006 Paper
Proceedings Volume 6349, 634922 (2006) https://doi.org/10.1117/12.692921
KEYWORDS: Photomasks, Optical lithography, Optical proximity correction, Double patterning technology, Etching, Model-based design, Printing, Manufacturing, Critical dimension metrology, Photoresist processing

Showing 5 of 93 publications
Conference Committee Involvement (4)
Photomask Technology
18 September 2007 | Monterey, California, United States
Photomask Technology
19 September 2006 | Monterey, California, United States
Photomask Technology
3 October 2005 | Monterey, California, United States
Photomask Technology
14 September 2004 | Monterey, California, United States
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