Liguo Zhang
Sr. Manager at Siemens EDA
SPIE Involvement:
Publications (33)

Proceedings Article | 12 October 2021 Presentation + Paper
Proceedings Volume 11855, 118550E (2021)
KEYWORDS: Photomasks, Scanning electron microscopy, Optical proximity correction, Semiconducting wafers, Feature extraction, Critical dimension metrology, Metrology, OLE for process control, Image quality, Image processing

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 1161113 (2021)
KEYWORDS: Process modeling, Semiconductor manufacturing, Control systems, Statistical analysis, Scanning electron microscopy, Process control, Calibration

Proceedings Article | 23 March 2020 Presentation + Paper
Xiaojing Su, Yayi Wei, Rui Chen, Yajuan Su, Lisong Dong, Joe Kwan, Recoo Zhang, Chunshan Du, Qijian Wan, Xinyi Hu
Proceedings Volume 11328, 113280L (2020)
KEYWORDS: Lithography, Chemical mechanical planarization, Optical proximity correction, Design for manufacturing, Metals, Resolution enhancement technologies, Optical lithography, Silicon, Manufacturing, Etching

Proceedings Article | 20 March 2019 Paper
Xiaolong Ma, Yanxiang Liu, Xinyi Hu, Qijian Wan, Zhengfang Liu, Chunshan Du, Liguo Zhang
Proceedings Volume 10962, 1096215 (2019)
KEYWORDS: Lithography, Logic, Image classification, Visualization, Computer simulations, Manufacturing, Roads, Databases, Library classification systems

Proceedings Article | 20 March 2018 Paper
Huan Kan, Lucas Huang, Legender Yang, Elaine Zou, Qijian Wan, Chunshan Du, Xinyi Hu, Zhengfang Liu, Yu Zhu, Recoo Zhang, Elven Huang, Jonathan Muirhead
Proceedings Volume 10588, 105880Z (2018)
KEYWORDS: Visualization, Multilayers, Manufacturing, Intellectual property

Showing 5 of 33 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top