Prof. Hans Peter Herzig Profile

Prof. Hans Peter Herzig

Professor at Ecole Polytechnique Federale de Lausanne

SPIE Involvement:

Conference Program Committee | Conference Chair | Author

Publications (117)

PROCEEDINGS ARTICLE | March 14, 2018

Photonic crystals for Bloch surface wave propagation based on lithium niobate thin films (Conference Presentation)

Proc. SPIE. 10544, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI

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PROCEEDINGS ARTICLE | January 2, 2018

Manipulation of Bloch surface waves: from subwavelength focusing to nondiffracting beam

Proc. SPIE. 10456, Nanophotonics Australasia 2017

KEYWORDS: Optical components, Diffraction, Dielectrics, Near field scanning optical microscopy, Near field, Photonics, Nondiffracting beams, Diffraction gratings

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PROCEEDINGS ARTICLE | February 27, 2017

Light fields behind microstructures: study of the Babinet-principle in the Fresnel regime

Proc. SPIE. 10120, Complex Light and Optical Forces XI

KEYWORDS: Diffraction, Modulation, Polarization, Interferometry, Electromagnetic radiation, Computer simulations, Near field, Distance measurement, Near field diffraction, Objectives, Singular optics, Electromagnetism, Nanofabrication, Radio propagation, Diffraction gratings

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PROCEEDINGS ARTICLE | February 20, 2017

Scaling effect and its impact on wavelength-scale microlenses

Proc. SPIE. 10116, MOEMS and Miniaturized Systems XVI

KEYWORDS: Microelectromechanical systems, Optical components, Diffraction, Optical spheres, Scattering, Lenses, Glasses, Near field, Refraction, Photonics, Micro optics, Microlens, Geometrical optics

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PROCEEDINGS ARTICLE | February 16, 2017

Near-field investigation of Bloch surface wave based 2D optical components

Proc. SPIE. 10106, Integrated Optics: Devices, Materials, and Technologies XXI

KEYWORDS: Optical components, Nanostructures, Prisms, Multilayers, Finite-difference time-domain method, Axicons, Resonators, Dielectrics, Optical microscopy, Near field scanning optical microscopy, Near field, Heterodyning, Photonics, Integrated optics, Dielectric polarization, Near field optics

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PROCEEDINGS ARTICLE | November 8, 2016

Polarization controlled directional excitation of Bloch surface waves (Conference Presentation)

Proc. SPIE. 9919, Nanophotonic Materials XIII

KEYWORDS: Surface plasmon polaritons, Finite-difference time-domain method, Silica, Dielectrics, Interfaces, Photonic crystals, Integrated optics, Electromagnetism, Radio propagation, Dielectric polarization

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PROCEEDINGS ARTICLE | April 27, 2016

Precision glass molding of high-resolution diffractive optical elements

Proc. SPIE. 9888, Micro-Optics 2016

KEYWORDS: Fabrication, Carbon, Lithography, Electron beam lithography, Diffraction, Beam splitters, Diffractive optical elements, Silica, Etching, Glasses, Silicon, Scanning electron microscopy, Micro optics, Optical resolution, Photomasks, Integrated optics, Reactive ion etching, Precision glass molding

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PROCEEDINGS ARTICLE | March 15, 2016

Coherence management in lithography printing systems

Proc. SPIE. 9780, Optical Microlithography XXIX

KEYWORDS: Lithography, Diffraction, LED lighting, Microlens array, Lithographic illumination, Coherence (optics), Imaging systems, Printing, Photomasks, Spatial coherence, Optical proximity correction, Electroluminescent displays

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PROCEEDINGS ARTICLE | March 15, 2016

Phase analysis of amplitude binary mask structures

Proc. SPIE. 9780, Optical Microlithography XXIX

KEYWORDS: Diffraction, Phase shifting, Visualization, Microscopy, Image resolution, Phase shift keying, Printing, Optical proximity correction, Phase measurement, Binary data

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PROCEEDINGS ARTICLE | March 15, 2016

Transition of optical regime in miniaturized optical systems: light interactions beyond the refraction limit

Proc. SPIE. 9760, MOEMS and Miniaturized Systems XV

KEYWORDS: Nanotechnology, Optical components, Diffraction, Optical spheres, Silicon, Refraction, Photonics, Objectives, Mie scattering, Geometrical optics, Optical aberrations, Spherical lenses, Electromagnetic scattering, Photonic nanostructures, Miniature imaging systems

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PROCEEDINGS ARTICLE | March 4, 2016

Structured amplitude and phase fields behind microstructures: the quest for high contrast modulation at proximity

Proc. SPIE. 9764, Complex Light and Optical Forces X

KEYWORDS: Lithography, Diffraction, Modulation, Phase shift keying, Printing, Photomasks, Phase measurement, Geometrical optics, Neodymium, Stray light

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SPIE Journal Paper | January 29, 2016

Intensity and phase fields behind phase-shifting masks studied with high-resolution interference microscopy

Puthankovilakam, Krishnaparvathy , Scharf, Toralf , Kim, Myun-Sik , Naqavi, Ali , Herzig, Hans Peter , Weichelt, Tina , Zeitner, Uwe , Vogler, Uwe , Voelkel, Reinhard

JM3 Vol. 15 Issue 02

KEYWORDS: Phase shifts, Photomasks, Printing, Phase measurement, Microscopy, Diffraction, Quartz, Semiconducting wafers, Resolution enhancement technologies

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PROCEEDINGS ARTICLE | September 24, 2015

Multilevel micro-structuring of glassy carbon molds for precision glass molding

Proc. SPIE. 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V

KEYWORDS: Carbon, Beam splitters, Diffractive optical elements, Etching, Glasses, Silicon, Optical fabrication, Reactive ion etching, Semiconducting wafers, Precision glass molding

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PROCEEDINGS ARTICLE | September 23, 2015

Micro-optical freeform elements for beam-shaping

Proc. SPIE. 9630, Optical Systems Design 2015: Computational Optics

KEYWORDS: Optical components, Photovoltaics, Light sources, Diffractive optical elements, Laser ablation, Image quality, Chemical elements, Freeform optics, Inverse optics, Light wave propagation

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PROCEEDINGS ARTICLE | September 1, 2015

Standing wave integrated Fourier transform spectrometer for imaging spectrometry in the near infrared

Proc. SPIE. 9611, Imaging Spectrometry XX

KEYWORDS: Gold, Mirrors, Waveguides, Glasses, Spectroscopy, Light scattering, Fourier transforms, Infrared spectroscopy, Microlens, Imaging spectrometry

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PROCEEDINGS ARTICLE | August 21, 2015

Real-time protein aggregation monitoring based on a simultaneous light scattering investigation and a Bloch surface wave-based approach

Proc. SPIE. 9550, Biosensing and Nanomedicine VIII

KEYWORDS: Refractive index, Multilayers, Proteins, Polarization, Sensors, Dielectrics, Light scattering, Photonic crystals, Scatter measurement, Alzheimer's disease

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PROCEEDINGS ARTICLE | March 18, 2015

Intensity and phase fields behind Phase Shifting Masks studied with High Resolution Interference Microscopy

Proc. SPIE. 9426, Optical Microlithography XXVIII

KEYWORDS: Diffraction, Phase shifting, Quartz, Microscopy, Printing, Photomasks, Optical proximity correction, Phase measurement, Tolerancing, Phase shifts

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PROCEEDINGS ARTICLE | March 13, 2015

Multilevel micro-structuring of glassy carbon for precision glass molding of diffractive optical elements

Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII

KEYWORDS: Carbon, Titanium, Diffractive optical elements, Silica, Etching, Glasses, Photomasks, Reactive ion etching, Power meters, Precision glass molding

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PROCEEDINGS ARTICLE | March 10, 2015

Interferometric study on Gouy phase anomaly of microlens array

Proc. SPIE. 9386, Practical Holography XXIX: Materials and Applications

KEYWORDS: Diffraction, Finite-difference time-domain method, Microlens array, Interferometry, Phase shift keying, Micro optics, Microlens, Phase measurement, Spherical lenses, Phase shifts

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PROCEEDINGS ARTICLE | September 25, 2014

Surface micro-structuring of glassy carbon for precision glass molding of diffractive optical elements

Proc. SPIE. 9192, Current Developments in Lens Design and Optical Engineering XV

KEYWORDS: Carbon, Titanium, Diffractive optical elements, Silica, Etching, Glasses, Photomasks, Reactive ion etching, Precision glass molding, Glass molding

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PROCEEDINGS ARTICLE | August 18, 2014

Shaping intensity behind amplitude masks for proximity correction lithography: design, measurement, and realization

Proc. SPIE. 9203, Interferometry XVII: Techniques and Analysis

KEYWORDS: Lithography, Microscopes, Beam splitters, Lithographic illumination, Printing, Objectives, Photomasks, Optical proximity correction, Structural design, Resolution enhancement technologies

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PROCEEDINGS ARTICLE | May 8, 2014

Real-time protein aggregation monitoring with a Bloch surface wave-based approach

Proc. SPIE. 9129, Biophotonics: Photonic Solutions for Better Health Care IV

KEYWORDS: Refractive index, Proteins, Sensors, Calibration, Water, Dielectrics, Interfaces, Silicon, Photonic crystals, Alzheimer's disease

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PROCEEDINGS ARTICLE | May 8, 2014

Localized biomolecular sensing enabled through plasmonic nanocavities

Proc. SPIE. 9129, Biophotonics: Photonic Solutions for Better Health Care IV

KEYWORDS: Gold, Plasmonics, Refractive index, Biosensing, Waveguides, Sensors, Metals, Dielectrics, Silicon, Photonics

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PROCEEDINGS ARTICLE | March 7, 2014

Wafer-level microstructuring of glassy carbon

Proc. SPIE. 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII

KEYWORDS: Carbon, Titanium, Optical lithography, Etching, Glasses, Photoresist materials, Photomasks, Aluminum, Reactive ion etching, Semiconducting wafers

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SPIE Journal Paper | September 24, 2013

Publisher’s note: Light confinement effect of nonspherical nanoscale solid immersion lenses

Kim, Myun-Sik , Scharf, Toralf , Nguyen, David , Keeler, Ethan , Rydberg, Skyler , Nakagawa, Wataru , Osowiecki, Gaël , Voelkel, Reinhard , Herzig, Hans Peter

JM3 Vol. 12 Issue 04

KEYWORDS: Solids, Lenses, Photonics, Micro optics, Microelectromechanical systems, Photonic devices, Computer engineering

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PROCEEDINGS ARTICLE | September 24, 2013

Polymer based single mode optical waveguide for spectroscopy applications

Proc. SPIE. 8846, Terahertz Emitters, Receivers, and Applications IV

KEYWORDS: Optical fibers, Refractive index, Polishing, Waveguides, Polymers, Glasses, Spectroscopy, Scanning electron microscopy, Semiconducting wafers, Polymer multimode waveguides

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SPIE Journal Paper | July 1, 2013

Field curvature correction in multichannel miniature imaging systems suited for wafer-level production

Logean, Eric , Scharf, Toralf , Bongard, Nicolas , Herzig, Hans Peter , Rossi, Markus

OE Vol. 52 Issue 07

KEYWORDS: Monochromatic aberrations, Objectives, Image sensors, Image quality, Sensors, Semiconducting wafers, Modulation transfer functions, Satellites, Wafer-level optics, Miniature imaging systems

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SPIE Journal Paper | June 12, 2013

Light confinement effect of nonspherical nanoscale solid immersion lenses

Kim, Myun-Sik , Scharf, Toralf , Nguyen, David , Keeler, Ethan , Rydberg, Skyler , Nakagawa, Wataru , Osowiecki, Gaël , Voelkel, Reinhard , Herzig, Hans Peter

JM3 Vol. 12 Issue 02

KEYWORDS: Solids, Nanolithography, Lenses, Spherical lenses, Polymethylmethacrylate, Lithography, Electron beam lithography, Silicon, Microscopes, Objectives

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PROCEEDINGS ARTICLE | March 7, 2013

Multiple-field approach for aberration correction in miniature imaging systems based on wafer-level production

Proc. SPIE. 8667, Multimedia Content and Mobile Devices

KEYWORDS: Monochromatic aberrations, Imaging systems, Sensors, Satellites, Satellite imaging, Image sensors, Objectives, Modulation transfer functions, Semiconducting wafers, Electroluminescent displays

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PROCEEDINGS ARTICLE | March 5, 2013

Light confinement effect of non-spherical nanoscale solid immersion lenses

Proc. SPIE. 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI

KEYWORDS: Lithography, Microscopes, Electron beam lithography, Polymethylmethacrylate, Lenses, Silicon, Solids, 3D metrology, Spherical lenses, Nanolithography

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PROCEEDINGS ARTICLE | March 5, 2013

Low-NA focused vortex beam lithography for below 100-nm feature size at 405 nm illumination

Proc. SPIE. 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI

KEYWORDS: Lithography, Lithographic illumination, Polarization, Polarizers, Scanning electron microscopy, Photoresist materials, Solids, Photomasks, Nanolithography, Dielectric polarization

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PROCEEDINGS ARTICLE | December 18, 2012

High numerical aperture silicon collimating lens for mid-infrared quantum cascade lasers manufactured using wafer-level techniques

Proc. SPIE. 8550, Optical Systems Design 2012

KEYWORDS: Mid-IR, Etching, Silicon, Manufacturing, Quantum cascade lasers, Micro optics, Aspheric lenses, Reactive ion etching, Photoresist processing, Semiconducting wafers

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PROCEEDINGS ARTICLE | May 5, 2012

Advanced optical characterization of micro solid immersion lens

Proc. SPIE. 8430, Optical Micro- and Nanometrology IV

KEYWORDS: Microscopes, Refractive index, Silica, Polarization, Polarizers, Refraction, Solids, 3D metrology, Beam shaping, Illumination engineering

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PROCEEDINGS ARTICLE | February 15, 2012

Axial phase measurements of light interacting with microstructures

Proc. SPIE. 8250, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI

KEYWORDS: Microscopes, Optical spheres, Interferometry, Wave propagation, Photonics, 3D metrology, Phase measurement, Phase velocity, Light wave propagation, Phase shifts

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PROCEEDINGS ARTICLE | February 11, 2012

Generation of highly confined optical bottle beams by exploiting the photonic nanojet effect

Proc. SPIE. 8274, Complex Light and Optical Forces VI

KEYWORDS: Mirrors, Gaussian beams, Optical spheres, Particles, Dielectrics, Wavefronts, Bessel beams, Atmospheric particles, Illumination engineering, Photonic nanostructures

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PROCEEDINGS ARTICLE | February 9, 2012

Optical characterization of subwavelength-scale solid immersion lenses

Proc. SPIE. 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V

KEYWORDS: Lithography, Electron beam lithography, Polymethylmethacrylate, Polymers, Glasses, Interfaces, Solids, 3D metrology, Spherical lenses, Near field optics

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PROCEEDINGS ARTICLE | June 15, 2011

Investigation of protein aggregation dynamics with a Bloch surface wave sensor

Proc. SPIE. 8090, Novel Biophotonic Techniques and Applications

KEYWORDS: FT-IR spectroscopy, Proteins, Biomedical optics, Sensors, Spectroscopy, Fluorescence spectroscopy, Heterodyning, Pathogens, Wave sensors, Alzheimer's disease

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PROCEEDINGS ARTICLE | May 27, 2011

Measuring amplitude and phase of light emerging from microstructures with HRIM

Proc. SPIE. 8082, Optical Measurement Systems for Industrial Inspection VII

KEYWORDS: Diffraction, Microscopy, Image resolution, Distance measurement, 3D metrology, Near field diffraction, Objectives, Charge-coupled devices, Phase measurement, Diffraction gratings

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PROCEEDINGS ARTICLE | April 20, 2011

Enhanced light trapping in realistic thin film solar cells using one-dimensional gratings

Proc. SPIE. 8065, SPIE Eco-Photonics 2011: Sustainable Design, Manufacturing, and Engineering Workforce Education for a Green Future

KEYWORDS: External quantum efficiency, Polarization, Reflection, Solar cells, Interfaces, Silver, Thin film solar cells, Aluminum, Binary data, Absorption

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PROCEEDINGS ARTICLE | February 14, 2011

Shaping light with MOEMS

Proc. SPIE. 7930, MOEMS and Miniaturized Systems X

KEYWORDS: Actuators, Mirrors, Ultraviolet radiation, Silicon, Magnetism, Diffusers, Microopto electromechanical systems, Micromirrors, Beam shaping, Pulse shaping

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PROCEEDINGS ARTICLE | January 17, 2011

Photonic nanojet engineering: focal point shaping with scattering phenomena of dielectric microspheres

Proc. SPIE. 7941, Integrated Optics: Devices, Materials, and Technologies XV

KEYWORDS: Diffraction, Optical spheres, Scattering, Wavefronts, Wave propagation, Objectives, Bessel beams, Spherical lenses, Illumination engineering, Photonic nanostructures

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SPIE Journal Paper | January 1, 2011

Demonstration of superprism effect in silicon pillar 2-D photonic crystal infiltrated with liquid crystals

Baroni, Pierre-Yves , Paeder, Vincent , Chang, Yu-Chi , Roussey, Matthieu , Herzig, Hans Peter , Nakagawa, Wataru

OE Vol. 50 Issue 01

KEYWORDS: Liquid crystals, Photonic crystals, Silicon, Waveguides, Liquid crystal on silicon, Silicon photonics, Modulation, Refractive index, Infrared cameras, Optical engineering

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PROCEEDINGS ARTICLE | February 17, 2010

Deformable silicon membrane for dynamic linear laser beam diffuser

Proc. SPIE. 7594, MOEMS and Miniaturized Systems IX

KEYWORDS: Actuators, Mirrors, Crystals, Silicon, Coating, Magnetism, Semiconductor lasers, Diffusers, Aluminum, Deep reactive ion etching

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PROCEEDINGS ARTICLE | September 17, 2008

Refractive statistical concave 1D diffusers for laser beam shaping

Proc. SPIE. 7062, Laser Beam Shaping IX

KEYWORDS: Optical components, Data modeling, Silica, Etching, Diffusion, Diffusers, Microlens, Photomasks, Spherical lenses, Isotropic etching

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PROCEEDINGS ARTICLE | May 14, 2008

Refraction and interference in micro- and nanostructure optical elements

Proc. SPIE. 6992, Micro-Optics 2008

KEYWORDS: Reflectors, Nanostructures, Prisms, Reflection, Polymers, Glasses, Reflectivity, Scanning electron microscopy, Adhesives, Nanolithography

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PROCEEDINGS ARTICLE | May 14, 2008

Polarization sensitive diffuser

Proc. SPIE. 6992, Micro-Optics 2008

KEYWORDS: Polarization, Birefringence, Polymers, Glasses, Ultraviolet radiation, Molecules, Polarizers, Diffusers, Liquid crystals, Liquids

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PROCEEDINGS ARTICLE | February 14, 2008

Multifunctional micro-optical elements for laser beam homogenizing and beam shaping

Proc. SPIE. 6879, Photon Processing in Microelectronics and Photonics VII

KEYWORDS: Diffraction, Telescopes, Mirrors, Homogenization, Microlens array, Laser applications, Diffusers, Microlens, Beam shaping, Beam homogenizers

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PROCEEDINGS ARTICLE | August 1, 2007

Corrugated grating on organic multilayer Bragg reflector

Proc. SPIE. 6785, ROMOPTO 2006: Eighth Conference on Optics

KEYWORDS: Reflectors, Refractive index, Mirrors, Multilayers, Reflection, Polymers, Glasses, Ultraviolet radiation, Specular reflections, Diffraction gratings

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PROCEEDINGS ARTICLE | March 5, 2007

Sub-Doppler diode laser frequency stabilization with the DAVLL scheme on the D1 line of a 87Rb vapor-cell

Proc. SPIE. 6604, 14th International School on Quantum Electronics: Laser Physics and Applications

KEYWORDS: Doppler effect, Polarization, Magnetism, Semiconductor lasers, Heterodyning, Laser stabilization, Signal generators, Laser beam diagnostics, Rubidium, Absorption

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PROCEEDINGS ARTICLE | April 27, 2006

AFM benchmark for the profile characterisation of subwavelength diffractive elements within the EC Network of Excellence on Micro-Optics (NEMO)

Proc. SPIE. 6188, Optical Micro- and Nanometrology in Microsystems Technology

KEYWORDS: Metrology, Calibration, Etching, Scanners, Atomic force microscopy, Optical testing, Scanning electron microscopy, Micro optics, Inverse optics, Diffraction gratings

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PROCEEDINGS ARTICLE | April 21, 2006

Achromatic microlenses

Proc. SPIE. 6185, Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration

KEYWORDS: Chromatic aberrations, Diffraction, Refractive index, Gaussian beams, Optical properties, Wave propagation, Refraction, Micro optics, Microlens, Geometrical optics

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PROCEEDINGS ARTICLE | April 21, 2006

Parallel atomic force microscopy using optical heterodyne detection

Proc. SPIE. 6186, MEMS, MOEMS, and Micromachining II

KEYWORDS: Photodetectors, Beam splitters, Interferometers, Atomic force microscopy, Heterodyning, Atomic force microscope, Bragg cells, Signal detection, Binary data, Michelson interferometers

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PROCEEDINGS ARTICLE | April 20, 2006

Fabrication of large-area two-dimensional photonic crystals using interference lithography and direct writing of defects

Proc. SPIE. 6182, Photonic Crystal Materials and Devices III (i.e. V)

KEYWORDS: Lithography, Waveguides, Crystals, Silicon, Lamps, Photonic crystals, Photoresist materials, Reactive ion etching, Semiconducting wafers, Nanolithography

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PROCEEDINGS ARTICLE | January 23, 2006

Tunable microcavities in planar photonic crystals

Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV

KEYWORDS: Switching, Modulation, Waveguides, Dispersion, Silicon, Photonic crystals, Integrated optics, Optical microcavities, Beam controllers, Plasma

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PROCEEDINGS ARTICLE | March 14, 2005

On the coupling and transmission of transverse and longitudinal fields into fully metal-coated optical nano-probes

Proc. SPIE. 5736, Nanomanipulation with Light

KEYWORDS: Polarization, Quartz, Metals, Coating, Near field scanning optical microscopy, Near field, Liquid crystals, Aluminum, Radio propagation, Near field optics

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SPIE Journal Paper | November 1, 2004

Review of iterative Fourier-transform algorithms for beam shaping applications

Ripoll, Olivier , Kettunen, Ville , Herzig, Hans Peter

OE Vol. 43 Issue 11

KEYWORDS: Computer generated holography, Beam shaping, Binary data, Diffractive optical elements, Electro-optical engineering, Beam splitters, Fourier transforms, Optical design, Optical engineering, Quantization

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PROCEEDINGS ARTICLE | September 8, 2004

Submicro-optics: big effects on a small scale

Proc. SPIE. 5453, Micro-Optics, VCSELs, and Photonic Interconnects

KEYWORDS: Optical filters, Waveguides, Nanoparticles, Glasses, Particles, Silver, Reflectivity, Photonic crystals, Microlens, Liquid crystals

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PROCEEDINGS ARTICLE | September 8, 2004

Comparative study of glass and plastic refractive microlenses and their fabrication techniques

Proc. SPIE. 5453, Micro-Optics, VCSELs, and Photonic Interconnects

KEYWORDS: Fabrication, Lithography, Photovoltaics, Laser ablation, Geology, Printing, Microlens, Mining, Reactive ion etching, Digital Light Processing

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PROCEEDINGS ARTICLE | August 17, 2004

Lateral error reduction in the 3D characterization of deep MOEMS devices using white light interference microscopy

Proc. SPIE. 5458, Optical Micro- and Nanometrology in Manufacturing Technology

KEYWORDS: Point spread functions, Mirrors, Modulation, Teeth, Spectroscopy, Microscopy, Fourier transforms, 3D metrology, Objectives, Microopto electromechanical systems

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PROCEEDINGS ARTICLE | August 17, 2004

Metrology of refractive microlens arrays

Proc. SPIE. 5458, Optical Micro- and Nanometrology in Manufacturing Technology

KEYWORDS: Metrology, Microlens array, Optical spheres, Interferometers, Wavefronts, Microlens, Aspheric lenses, Reactive ion etching, Spherical lenses, Semiconducting wafers

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PROCEEDINGS ARTICLE | August 16, 2004

MEMS tunable filter for telecom applications

Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining

KEYWORDS: Microelectromechanical systems, Actuators, Optical filters, Capacitors, Waveguides, Polarization, Etching, Electrodes, Silicon, Deep reactive ion etching

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PROCEEDINGS ARTICLE | August 16, 2004

Infrared MEMS-based Lamellar grating spectrometer

Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining

KEYWORDS: Actuators, Diffraction, Mirrors, Interferometers, Sensors, Spectroscopy, Lamps, Semiconductor lasers, Xenon, Diffraction gratings

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PROCEEDINGS ARTICLE | January 24, 2004

Artificial compound eyes: different concepts and their application for ultraflat image acquisition sensors

Proc. SPIE. 5346, MOEMS and Miniaturized Systems IV

KEYWORDS: Superposition, Eye, Microlens array, Imaging systems, Lenses, Cameras, Sensors, Image acquisition, Microlens, Semiconducting wafers

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PROCEEDINGS ARTICLE | December 29, 2003

One-dimensional and two-dimensional periodic structures for security devices, resonant filters, and photonic crystals

Proc. SPIE. 5184, Physics, Theory, and Applications of Periodic Structures in Optics II

KEYWORDS: Optical components, Diffraction, Optical filters, Fabry–Perot interferometers, Waveguides, Glasses, Photonic crystals, Chemical elements, Binary data, Diffraction gratings

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PROCEEDINGS ARTICLE | November 19, 2003

Micro-fabricated spectral analysers

Proc. SPIE. 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life

KEYWORDS: Actuators, Optical fibers, Optical components, Mirrors, Beam splitters, Interferometers, Spectrometers, Silicon, Michelson interferometers, Diffraction gratings

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PROCEEDINGS ARTICLE | November 19, 2003

Heterodyne scanning near-field optical microscope

Proc. SPIE. 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life

KEYWORDS: Optical microscopes, Polarization, Nd:YAG lasers, Interferometry, Near field scanning optical microscopy, Near field, Heterodyning, Phase measurement, Near field optics, Diffraction gratings

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SPIE Conference Volume | November 3, 2003

Lithographic and Micromachining Techniques for Optical Component Fabrication II

PROCEEDINGS ARTICLE | November 3, 2003

Periodic structures with arbitrary shapes recorded by multiple-beam interference

Proc. SPIE. 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II

KEYWORDS: Optical components, Lithography, Antireflective coatings, Diffractive optical elements, Spatial frequencies, Control systems, Distortion, Scanning electron microscopy, Photoresist materials, Beam shaping

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PROCEEDINGS ARTICLE | November 3, 2003

Resonant grating filters at oblique incidence

Proc. SPIE. 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II

KEYWORDS: Diffraction, Optical filters, Refractive index, Optical design, Waveguides, Polarization, Planar waveguides, Tunable filters, Diffraction gratings, Absorption

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PROCEEDINGS ARTICLE | April 19, 2002

Zero-order gratings for optically variable devices

Proc. SPIE. 4677, Optical Security and Counterfeit Deterrence Techniques IV

KEYWORDS: Superposition, Diffraction, Mirrors, Optical design, Moire patterns, Polarization, Visualization, Reflection, Information visualization, Diffraction gratings

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SPIE Journal Paper | March 1, 2002

Improved red color with cholesteric liquid crystals in Bragg reflection mode

Kipfer, Peter , Klappert, Rolf , Herzig, Hans Peter , Grupp, Joachim , Daendliker, Rene

OE Vol. 41 Issue 03

KEYWORDS: Optical filters, Reflection, Birefringence, Reflectivity, LCDs, Reflectors, Liquid crystals, Optical engineering, Absorption, Eye

PROCEEDINGS ARTICLE | February 1, 2002

Massive free-space optical 1xN fiber switch using an adaptive membrane mirror

Proc. SPIE. 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III

KEYWORDS: Mirrors, Switches, Electrodes, Single mode fibers, Adaptive optics, Deformable mirrors, Free space optics, Optical switching, Optimization (mathematics), Evolutionary algorithms

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PROCEEDINGS ARTICLE | December 5, 2001

Optical near-field phase singularities produced by microstructures

Proc. SPIE. 4456, Controlling and Using Light in Nanometric Domains

KEYWORDS: Microscopes, Optical microscopes, Diffraction, Polarization, Wave propagation, Heterodyning, Phase measurement, Scanning probe microscopes, Near field optics, Diffraction gratings

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PROCEEDINGS ARTICLE | November 13, 2001

Design and modeling of a miniature system containing micro-optics

Proc. SPIE. 4437, Gradient Index, Miniature, and Diffractive Optical Systems II

KEYWORDS: Optical components, Diffraction, Gaussian beams, Microlens array, Wavefronts, Wave propagation, Refraction, Ray tracing, Beam propagation method, Systems modeling

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PROCEEDINGS ARTICLE | November 13, 2001

Efficient beamshaping of high-power diode lasers using micro-optics

Proc. SPIE. 4437, Gradient Index, Miniature, and Diffractive Optical Systems II

KEYWORDS: Multimode fibers, Gradient-index optics, Optical components, Lithography, Diffraction, Antireflective coatings, Diffractive optical elements, Silica, Glasses, Wave propagation

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SPIE Conference Volume | November 9, 2001

Lithographic and Micromachining Techniques for Optical Component Fabrication

SPIE Journal Paper | July 1, 2001

Low numerical aperture refractive microlenses in fused silica

Nussbaum, Philippe , Herzig, Hans Peter

OE Vol. 40 Issue 07

KEYWORDS: Microlens, Photoresist materials, Silica, Etching, Reactive ion etching, Spherical lenses, Mach-Zehnder interferometers, Lithography, Optical spheres, Wavefronts

PROCEEDINGS ARTICLE | May 30, 2001

Phase singularities generated by optical microstructures: theory and experimental results

Proc. SPIE. 4403, Second International Conference on Singular Optics (Optical Vortices): Fundamentals and Applications

KEYWORDS: Microscopes, Diffraction, Imaging systems, Microscopy, Near field, Phase measurement, Singular optics, Spiral phase plates, Binary data, Near field optics

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SPIE Journal Paper | May 1, 2001

Microlens systems for fluorescence detection in chemical microsystems

Roulet, Jean-Christophe , Voelkel, Reinhard , Herzig, Hans Peter , Verpoorte, Sabeth , de Rooij, Nico , Daendliker, Rene

OE Vol. 40 Issue 05

KEYWORDS: Microlens, Luminescence, Molecules, Glasses, Fluorescence spectroscopy, Sensors, Spherical lenses, Photoresist materials, Semiconducting wafers, Microfabrication

PROCEEDINGS ARTICLE | August 22, 2000

New design for an integrated Fourier transform spectrometer

Proc. SPIE. 4178, MOEMS and Miniaturized Systems

KEYWORDS: Actuators, Optical components, Mirrors, Beam splitters, Modulation, Sensors, Spectroscopy, Silicon, Fourier transforms, Collimation

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PROCEEDINGS ARTICLE | August 18, 2000

Fabrication technologies for micro-optical elements with arbitrary surfaces

Proc. SPIE. 4179, Micromachining Technology for Micro-Optics

KEYWORDS: Optical components, Lithography, Diffraction, Optical lithography, Silica, Photoresist materials, Photomasks, Reactive ion etching, Binary data, Multiphoton lithography

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SPIE Journal Paper | August 1, 2000

Surface profiles of reflow microlenses under the influence of surface tension and gravity

Schilling, Andreas , Merz, R. , Ossmann, Christian , Herzig, Hans Peter

OE Vol. 39 Issue 08

KEYWORDS: Microlens, Photoresist materials, Spherical lenses, Finite element methods, Photoresist processing, Liquids, Optical engineering, Photomasks, Partial differential equations, Fabrication

SPIE Journal Paper | January 1, 2000

Holographically recorded gratings on microlenses for a miniaturized spectrometer array

Traut, Silke , Herzig, Hans Peter

OE Vol. 39 Issue 01

KEYWORDS: Microlens array, Microlens, Spectroscopy, Chemical elements, Holography, Diffraction gratings, Photoresist materials, Optical components, Ray tracing, Coating

PROCEEDINGS ARTICLE | September 2, 1999

Miniaturized time-scanning Fourier Transform Spectrometer based on silicon technology

Proc. SPIE. 3878, Miniaturized Systems with Micro-Optics and MEMS

KEYWORDS: Actuators, Fourier spectroscopy, Mirrors, Beam splitters, Modulation, Spectroscopy, Silicon, Fourier transforms, Helium neon lasers, Michelson interferometers

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PROCEEDINGS ARTICLE | August 31, 1999

Potential of dry etching for the fabrication of fused silica micro-optical elements

Proc. SPIE. 3879, Micromachine Technology for Diffractive and Holographic Optics

KEYWORDS: Optical spheres, Silica, Etching, Dry etching, Glasses, Photoresist materials, Microlens, Aspheric lenses, Reactive ion etching, Plasma

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PROCEEDINGS ARTICLE | July 19, 1999

Achromatization of the diffraction efficiency of diffractive optical elements

Proc. SPIE. 3749, 18th Congress of the International Commission for Optics

KEYWORDS: Chromatic aberrations, Diffraction, Diffractive optical elements, Reflection, Glasses, Interfaces, Laser ablation, Refraction, Tolerancing, Microtechnology

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PROCEEDINGS ARTICLE | July 19, 1999

Miniaturized time-scanning Fourier transform spectrometer using an electrostatic actuator

Proc. SPIE. 3749, 18th Congress of the International Commission for Optics

KEYWORDS: Wafer-level optics, Actuators, Mirrors, Beam splitters, Sensors, Spectroscopy, Silicon, Fourier transforms, Helium neon lasers, Michelson interferometers

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PROCEEDINGS ARTICLE | July 19, 1999

Imaging of (sub-) wavelength sized objects

Proc. SPIE. 3749, 18th Congress of the International Commission for Optics

KEYWORDS: Optical components, Optical microscopes, Diffraction, Super resolution, Spatial frequencies, Near field scanning optical microscopy, Objectives, Optical resolution, Near field optics, Diffraction gratings

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SPIE Journal Paper | April 1, 1999

Pulsed fiber laser using micro-electro-mechanical mirrors

Peter, Yves-Alain , Herzig, Hans Peter , Rochat, Etienne , Daendliker, Rene , Marxer, Cornel , de Rooij, Nico

OE Vol. 38 Issue 04

KEYWORDS: Mirrors, Micromirrors, Pulsed fiber lasers, Fiber lasers, Switching, Modulation, Reflectivity, Scanning electron microscopy, Optical simulations, Modulators

PROCEEDINGS ARTICLE | March 10, 1999

Optical fiber switching device with active alignment

Proc. SPIE. 3680, Design, Test, and Microfabrication of MEMS and MOEMS

KEYWORDS: Optical fibers, Optical components, Mirrors, Switches, Switching, Single mode fibers, Microopto electromechanical systems, Microlens, Optical alignment, Optical switching

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PROCEEDINGS ARTICLE | October 20, 1998

Design methods for illumination light pipes

Proc. SPIE. 3428, Illumination and Source Engineering

KEYWORDS: Light sources, Scattering, Light scattering, Computer simulations, Ray tracing, Light sources and illumination, Computer aided design, Optics manufacturing, Illumination engineering, Absorption

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PROCEEDINGS ARTICLE | October 13, 1998

Scanning near-field optical microscopy: transfer function and resolution limit

Proc. SPIE. 3467, Far- and Near-Field Optics: Physics and Information Processing

KEYWORDS: Optical components, Optical design, Spatial frequencies, Sensors, Optical microscopy, Free space, Near field scanning optical microscopy, Wave propagation, Optical resolution, Near field optics

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PROCEEDINGS ARTICLE | September 7, 1998

Optical microsystems for imaging

Proc. SPIE. 3410, Advanced Focal Plane Arrays and Electronic Cameras II

KEYWORDS: Diffraction, Telescopes, Eye, Moire patterns, Microlens array, Imaging systems, Lenses, Sensors, Micro optics, Receptors

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PROCEEDINGS ARTICLE | September 2, 1998

XY-stage for alignment of optical elements in MOEMS

Proc. SPIE. 3513, Microelectronic Structures and MEMS for Optical Processing IV

KEYWORDS: Optical fibers, Optical components, Switches, Quartz, Networks, Single mode fibers, Microopto electromechanical systems, Microlens, Optical alignment, Optical switching

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SPIE Conference Volume | September 2, 1998

Microelectronic Structures and MEMS for Optical Processing IV

SPIE Journal Paper | June 1, 1998

Simple technique for replication of micro-optical elements

Nussbaum, Philippe , Philipoussis, Irene , Husser, Aline , Herzig, Hans Peter

OE Vol. 37 Issue 06

KEYWORDS: Microlens, Adhesives, Diffraction gratings, Optical components, Diffraction, Optical spheres, Microlens array, Photoresist materials, Refractive index, Interferometers

PROCEEDINGS ARTICLE | May 22, 1998

Miniaturized focusing fan-out elements: design, fabrication, and characterization

Proc. SPIE. 3490, Optics in Computing '98

KEYWORDS: Staring arrays, Optical components, Diffraction, Microlens array, Fluctuations and noise, Photoresist materials, Microlens, Optical alignment, Multiphoton lithography, Diffraction gratings

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PROCEEDINGS ARTICLE | September 24, 1997

Design, fabrication, and testing of micro-optical components for sensors and microsystems

Proc. SPIE. 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications

KEYWORDS: Microlens array, Silica, Imaging systems, Lenses, Sensors, Photoresist materials, Microlens, Photomasks, Geometrical optics, Reactive ion etching

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PROCEEDINGS ARTICLE | September 2, 1997

Micro-opto-mechanical systems: applications in pulsed fiber lasers and optical switching

Proc. SPIE. 3226, Microelectronic Structures and MEMS for Optical Processing III

KEYWORDS: Switches, Switching, Telecommunications, Microopto electromechanical systems, Micromirrors, Optical simulations, Optical switching, Pulsed fiber lasers, Pulsed laser operation, Q switched fiber lasers

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PROCEEDINGS ARTICLE | September 2, 1997

Refractive and diffractive elements for micro-optical systems

Proc. SPIE. 3226, Microelectronic Structures and MEMS for Optical Processing III

KEYWORDS: Fabrication, Optical components, Quartz, Polymers, Glasses, Interferometry, Photoresist materials, Optoelectronics, Optical resolution, Reactive ion etching

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SPIE Conference Volume | September 2, 1997

Microelectronic Structures and MEMS for Optical Processing III

PROCEEDINGS ARTICLE | December 20, 1996

Illumination light pipe using micro-optics as diffuser

Proc. SPIE. 2951, Holographic and Diffractive Techniques

KEYWORDS: Diffraction, Prisms, Optical properties, Reflection, Scattering, Light scattering, Diffusers, Micro optics, Specular reflections, Diffraction gratings

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SPIE Journal Paper | November 1, 1996

Microlens array imaging system for photolithography

Voelkel, Reinhard , Herzig, Hans Peter , Nussbaum, Philippe , Daendliker, Rene , Hugle, William

OE Vol. 35 Issue 11

KEYWORDS: Imaging systems, Microlens array, Lithography, Image resolution, Microlens, Wavefronts, Printing, Imaging arrays, Optical lithography, Modulation transfer functions

SPIE Journal Paper | October 1, 1996

Diffractive beamshaping elements at the fabrication limit

Singer, Wolfgang , Herzig, Hans Peter , Kuittinen, Markku , Piper, Eckhard , Wangler, Johannes

OE Vol. 35 Issue 10

KEYWORDS: Binary data, Etching, Diffraction, Lenses, Zone plates, Optical components, Fourier transforms, Convolution, Optical engineering, Error analysis

PROCEEDINGS ARTICLE | September 18, 1996

Optical testing of fine grating structures

Proc. SPIE. 2782, Optical Inspection and Micromeasurements

KEYWORDS: Diffraction, Nondestructive evaluation, Optical fabrication, Optical testing, Diffraction gratings

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PROCEEDINGS ARTICLE | August 26, 1996

Micro-optics for sensor applications

Proc. SPIE. 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems

KEYWORDS: Lithography, Microlens array, Silica, Lenses, Sensors, Photoresist materials, Microlens, Photomasks, Reactive ion etching, Spherical lenses

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PROCEEDINGS ARTICLE | August 23, 1996

Design of a nonconventional illumination system using a scattering light pipe

Proc. SPIE. 2774, Design and Engineering of Optical Systems

KEYWORDS: Polishing, Light emitting diodes, Polymethylmethacrylate, Scattering, Sensors, Interfaces, Light scattering, Reflectivity, Specular reflections, Light

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SPIE Journal Paper | December 1, 1995

Continuous-relief fan-out elements with optimized fabrication tolerances

Ehbets, Peter , Rossi, Markus , Herzig, Hans Peter

OE Vol. 34 Issue 12

KEYWORDS: Diffraction, Chemical elements, Tolerancing, Computer generated holography, Error analysis, Transition metals, Convolution, Transmittance, Point spread functions, Solids

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SPIE Journal Paper | August 1, 1995

Scanning spot metrology for testing of photolithographic masks

Blattner, Peter , Herzig, Hans Peter , Naqvi, S. Sohail

OE Vol. 34 Issue 08

KEYWORDS: Metrology, Signal detection, Nondestructive evaluation, Opacity, Detection and tracking algorithms, Sensors, Modulation

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SPIE Journal Paper | August 1, 1995

High-carrier-frequency fan-out gratings fabricated by total internal reflection holographic lithography

Ehbets, Peter , Herzig, Hans Peter , Kuittinen, Markku , Clube, Francis , Darbellay, Yves

OE Vol. 34 Issue 08

KEYWORDS: Reflection, Holography, Lithography, Binary data, Diffractive optical elements, Volume holography, Holograms, Printing, Photoresist materials

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PROCEEDINGS ARTICLE | September 30, 1994

Diffractive optical elements for space communication terminals

Proc. SPIE. 2210, Space Optics 1994: Space Instrumentation and Spacecraft Optics

KEYWORDS: Optical components, Diffraction, Beam splitters, Diffractive optical elements, Sensors, Glasses, Receivers, Collimation, Beam shaping, Chemical elements

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SPIE Journal Paper | February 1, 1994

Total internal reflection holography for optical interconnections

Prongue, Damien , Herzig, Hans Peter

OE Vol. 33 Issue 02

KEYWORDS: Holography, Holographic optical elements, Diffraction, Holograms, Photomasks, Spherical lenses, Very large scale integration, Near field, Optical components, Optical interconnects

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PROCEEDINGS ARTICLE | July 12, 1993

Continuous surface-relief gratings for two-dimensional array generation

Proc. SPIE. 1806, Optical Computing

KEYWORDS: Diffraction, Spatial frequencies, Phase shift keying, Photoresist materials, Raster graphics, Chemical elements, Optical computing, Intermodulation, Laser systems engineering, Diffraction gratings

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PROCEEDINGS ARTICLE | March 2, 1993

Fabrication of 2D continuous-relief diffractive optical elements

Proc. SPIE. 1732, Holographics International '92

KEYWORDS: Diffraction, Holography, Diffractive optical elements, Nickel, Control systems, Photoresist materials, Epoxies, Raster graphics, Electroplating, Laser systems engineering

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PROCEEDINGS ARTICLE | January 5, 1993

Design and fabrication of diffractive optical elements for beam shaping and imaging

Proc. SPIE. 1718, Workshop on Digital Holography

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PROCEEDINGS ARTICLE | September 1, 1991

Fan-out elements by multiple-beam recording in volume holograms

Proc. SPIE. 1507, Holographic Optics III: Principles and Applications

KEYWORDS: Signal to noise ratio, Diffraction, Holograms, Holography, Modulation, Phase shift keying, Volume holography, Intermodulation, Holographic materials, Diffraction gratings

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PROCEEDINGS ARTICLE | August 1, 1990

HOE for clock distribution in integrated circuits: experimental results

Proc. SPIE. 1281, Optical Interconnections and Networks

KEYWORDS: Diffraction, Holograms, Holographic optical elements, Holography, Clocks, Near field, Photomasks, Integrated circuits, Optical networks, Optical interconnects

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