Dr. Vidya Vaenkatesan
System Engineer at ASML Netherlands BV
SPIE Involvement:
Publications (12)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12953, 1295303 (2024) https://doi.org/10.1117/12.3010890
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Reticles, Scanners, Extreme ultraviolet lithography, Atomic force microscopy, 3D mask effects, Monte Carlo methods, Metrology, Simulations

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12494, 1249408 (2023) https://doi.org/10.1117/12.2658332
KEYWORDS: Speckle, Simulations, Extreme ultraviolet, Metrology, Critical dimension metrology, Edge roughness

Proceedings Article | 26 February 2021 Presentation + Paper
Adam Lyons, Luke Long, Tom Wallow, Chris Spence, Ton Kiers, Paul van Adrichem, Vidya Vaenkatesan, Jiyou Fu, Christoph Hennerkes, Cyrus Tabery
Proceedings Volume 11609, 116090C (2021) https://doi.org/10.1117/12.2584744

Proceedings Article | 27 June 2019 Paper
Proceedings Volume 11178, 1117807 (2019) https://doi.org/10.1117/12.2538243
KEYWORDS: Photomasks, Semiconducting wafers, Critical dimension metrology, Metrology, Extreme ultraviolet, Stochastic processes

Proceedings Article | 18 October 2018 Presentation + Paper
Proceedings Volume 10810, 108100U (2018) https://doi.org/10.1117/12.2502588
KEYWORDS: Photomasks, Semiconducting wafers, Critical dimension metrology, Liquid phase epitaxy, Extreme ultraviolet, Metrology, Cadmium sulfide, Nanoimprint lithography, Inspection, Error analysis

Showing 5 of 12 publications
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