Dr. Wayne R. McKinney
Optical Consultant
SPIE Involvement:
Area of Expertise:
Diffraction Gratings , VUV and Soft X-ray Optics , Optical Metrology , Grazing Incidence Optical Path , Scientific Programming , Ray Tracing
Publications (55)

Proceedings Article | 4 October 2022 Presentation + Paper
Proceedings Volume 12240, 122400C (2022) https://doi.org/10.1117/12.2633103
KEYWORDS: Microscopes, X-ray optics, Interferometry, Software development, X-rays, Data processing, Mirrors, Sensors, Data acquisition, Metrology

Proceedings Article | 18 September 2018 Paper
Proceedings Volume 10761, 1076108 (2018) https://doi.org/10.1117/12.2323218
KEYWORDS: Mirrors, X-rays, Grazing incidence, Metrology, X-ray optics, Optimization (mathematics), Software development, Geometrical optics, Error analysis, Algorithm development

Proceedings Article | 7 September 2017 Presentation + Paper
Proceedings Volume 10385, 103850I (2017) https://doi.org/10.1117/12.2274400
KEYWORDS: X-ray optics, Metrology, Interferometry, Prisms, Optical metrology, Free electron lasers, Diffraction, Synchrotrons, Coherent x-ray sources, X-ray sources

SPIE Journal Paper | 12 October 2015 Open Access
OE, Vol. 54, Issue 10, 104104, (October 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.10.104104
KEYWORDS: Metrology, X-ray optics, Control systems, Mirrors, Humidity, X-rays, Temperature metrology, Interferometry, Calibration, Particles

Proceedings Article | 1 September 2015 Paper
Proceedings Volume 9576, 957608 (2015) https://doi.org/10.1117/12.2185191
KEYWORDS: Modulation transfer functions, Binary data, Calibration, Spatial frequencies, Standards development, Optical microscopes, Silicon, Error analysis, Sensors, Optical fabrication

Showing 5 of 55 publications
Proceedings Volume Editor (3)

Conference Committee Involvement (6)
Advances in Metrology for X-Ray and EUV Optics IV
12 August 2012 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics III
1 August 2010 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics II
30 August 2007 | San Diego, California, United States
Theory and Practice of Surface-Relief Diffraction Gratings: Synchrotron and Other Applications
20 July 1998 | San Diego, CA, United States
Gratings and Grating Monochromators for Synchrotron Radiation
31 July 1997 | San Diego, CA, United States
Showing 5 of 6 Conference Committees
Course Instructor
NON-SPIE: Diffraction Gratings: Manufacture, Specification, and Application
Diffraction gratings are the most important wavelength dispersing optic from the soft x-ray to the infrared. This tutorial outlines the important details about the manufacture and specification of this important optical component. Both ruled and interferometrically generated gratings are covered, emphasizing the differences and unique advantages of each type. Important applications of gratings are briefly covered at the end of the tutorial. The tutorial was presented at the SPIE Annual Meeting in San Diego in conjunction with Conference 503, "International Conference on the Application, Theory, and Fabrication of Periodic Structures, Diffraction Gratings, and Moire Phenomena II.
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