Dr. Amir-Hossein Tamaddon
at imec
SPIE Involvement:
Publications (7)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 129550O (2024) https://doi.org/10.1117/12.3010421
KEYWORDS: Semiconducting wafers, Overlay metrology, Cross validation, Process control, Logic, Metrology, Simulations, Scanning electron microscopy, Lithography

Proceedings Article | 1 May 2023 Presentation + Paper
Julie Van Bel, Lander Verstraete, Hyo Seon Suh, Stefan De Gendt, Philippe Bezard, Jelle Vandereyken, Waikin Li, Matteo Beggiato, Amir-Hossein Tamaddon, Christophe Beral, Andreia Santos, Boaz Alperson, YoungJun Her
Proceedings Volume 12497, 124970K (2023) https://doi.org/10.1117/12.2657990
KEYWORDS: Directed self assembly, Block copolymers, Extreme ultraviolet, Annealing, Film thickness, Extreme ultraviolet lithography, Line edge roughness, Critical dimension metrology, Semiconducting wafers, Line width roughness

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12497, 124970I (2023) https://doi.org/10.1117/12.2657939
KEYWORDS: Block copolymers, Extreme ultraviolet, Directed self assembly, Extreme ultraviolet lithography, Bridges, Etching

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 124960I (2023) https://doi.org/10.1117/12.2658084
KEYWORDS: Ruthenium, Optical alignment, Semiconducting wafers, Overlay metrology, Oxides, Silicon, Metals, Etching, Scanners, Copper

Proceedings Article | 20 September 2020 Presentation
Proceedings Volume 11517, 115170N (2020) https://doi.org/10.1117/12.2572865
KEYWORDS: Extreme ultraviolet, Critical dimension metrology, Reticles, Extreme ultraviolet lithography, Scanners, Etching

Showing 5 of 7 publications
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