Franck Foussadier
RET Engineer at STMicroelectronics
SPIE Involvement:
Publications (20)

Proceedings Article | 24 March 2016 Paper
P. Fanton, J. C. Le Denmat, C. Gardiola, A. Pelletier, F. Foussadier, C. Gardin, J. Planchot, A. Szucs, O. Ndiaye, N. Martin, L. Depre, F. Robert
Proceedings Volume 9778, 97781U (2016)
KEYWORDS: 3D modeling, Optical proximity correction, Metals, 3D metrology, Optical lithography, Evolutionary algorithms, Photomasks, Scanning electron microscopy, Critical dimension metrology, Image processing, Etching, Calibration, Artificial intelligence, Reliability

Proceedings Article | 13 March 2012 Paper
Charlotte Beylier, Nicolas Martin, Vincent Farys, Franck Foussadier, Emek Yesilada, Frederic Robert, Stanislas Baron, Russell Dover, Hua-yu Liu
Proceedings Volume 8326, 832616 (2012)
KEYWORDS: SRAF, Source mask optimization, Lithography, Optical proximity correction, Photomasks, Resolution enhancement technologies, Scanning electron microscopy, Lithium, Image enhancement, Computational lithography

Proceedings Article | 8 April 2011 Paper
Proceedings Volume 7969, 79691P (2011)
KEYWORDS: Optical proximity correction, Detection and tracking algorithms, Computer simulations, Extreme ultraviolet, Genetic algorithms, Standards development, Photomasks, Extreme ultraviolet lithography, Lithography, Lanthanum

Proceedings Article | 3 April 2010 Paper
J. Le Denmat, V. Charbois, L. Tetar, M. Luche, G. Kerrien, F. Robert, E. Yesilada, F. Foussadier, L. Couturier, L. Karsenti, M. Geshel
Proceedings Volume 7641, 76410Y (2010)
KEYWORDS: Semiconducting wafers, Inspection, Wafer inspection, Optical alignment, Defect inspection, Finite element methods, Statistical analysis, Optical proximity correction, Etching, Control systems

Proceedings Article | 23 March 2009 Paper
Proceedings Volume 7272, 72721G (2009)
KEYWORDS: Mahalanobis distance, Critical dimension metrology, Optical proximity correction, Calibration, Fuzzy logic, Data modeling, Reliability, Scanning electron microscopy, Lithography, Optics manufacturing

Showing 5 of 20 publications
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