PROCEEDINGS VOLUME 5836
MICROTECHNOLOGIES FOR THE NEW MILLENNIUM 2005 | 9-11 MAY 2005
Smart Sensors, Actuators, and MEMS II
Proceedings Volume 5836 is from: Logo
MICROTECHNOLOGIES FOR THE NEW MILLENNIUM 2005
9-11 May 2005
Sevilla, Spain
Materials I
Proc. SPIE 5836, Ge and GeOx films as sacrificial layer for MEMS technology based on piezoelectric AlN: etching and planarization processes, 0000 (1 July 2005); doi: 10.1117/12.608244
Proc. SPIE 5836, Simulation, fabrication, and testing of aluminium nitride piezoelectric microbridges, 0000 (1 July 2005); doi: 10.1117/12.608228
Proc. SPIE 5836, Collodial TiO2 rod and dot based thin films for chemical sensors based on surface plasmon resonance, 0000 (1 July 2005); doi: 10.1117/12.608315
Proc. SPIE 5836, BaTiO3 nanocomposite thin films as pyroelectric sensor, 0000 (1 July 2005); doi: 10.1117/12.607717
Actuators I
Proc. SPIE 5836, Polymeric helices with submicron dimensions for MEMS devices, 0000 (1 July 2005); doi: 10.1117/12.608584
Proc. SPIE 5836, Development of a novel piezo-driven parallel-kinematics single crystal silicon micropositioning XY stage, 0000 (1 July 2005); doi: 10.1117/12.605632
Proc. SPIE 5836, Large displacement spring-like electro-mechanical thermal actuators with insulator constraint beams, 0000 (1 July 2005); doi: 10.1117/12.608299
Electronics Integration
Proc. SPIE 5836, MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing, 0000 (1 July 2005); doi: 10.1117/12.608354
Proc. SPIE 5836, Smart sensors modeling using VHDL-AMS for micro instruments implementation with a distributed architecture, 0000 (1 July 2005); doi: 10.1117/12.608338
Proc. SPIE 5836, Large-signal model of a resonating cantilever-based transducer for system level electrical simulation, 0000 (1 July 2005); doi: 10.1117/12.608462
Proc. SPIE 5836, High level communication interface design for integrated MEMS and microinstrument bus, 0000 (1 July 2005); doi: 10.1117/12.608642
Proc. SPIE 5836, Wafer level optoelectronic device packaging using MEMS, 0000 (1 July 2005); doi: 10.1117/12.608741
Fabrication Techniques I
Proc. SPIE 5836, An integrated self-masking technique for providing low-loss metallized RF MEMS devices in a polysilicon only MEMS process, 0000 (1 July 2005); doi: 10.1117/12.607592
Proc. SPIE 5836, Mass balancing and spring element manipulation of micromechanical silicon-gyrometers with ultrashort laser pulses, 0000 (1 July 2005); doi: 10.1117/12.608659
Proc. SPIE 5836, Laser material micro-processing of shape memory alloys, 0000 (1 July 2005); doi: 10.1117/12.608695
Proc. SPIE 5836, Thermal-stress control of microshutter arrays in cryogenic applications for the James Webb Space Telescope, 0000 (1 July 2005); doi: 10.1117/12.608754
Proc. SPIE 5836, Plasma activated wafer bonding for MEMS, 0000 (1 July 2005); doi: 10.1117/12.608788
Keynote Presentation
Proc. SPIE 5836, MEMS-based micro instruments for in-situ planetary exploration, 0000 (1 July 2005); doi: 10.1117/12.608381
Optical Devices
Proc. SPIE 5836, Silicon-nitride based micro optical components for optical pickup application, 0000 (1 July 2005); doi: 10.1117/12.608636
MEMS Modelling
Proc. SPIE 5836, MEMS/NEMS mechanical characterization on different thin film materials by scanning along micro-machined cantilevers, 0000 (1 July 2005); doi: 10.1117/12.608710
Proc. SPIE 5836, Optical monitoring and cooling of a micro-mechanical oscillator to the quantum limit, 0000 (1 July 2005); doi: 10.1117/12.609388
Chemical Sensors I
Proc. SPIE 5836, Suspended-gate thin film transistor as highly sensitive humidity sensor, 0000 (1 July 2005); doi: 10.1117/12.607341
Proc. SPIE 5836, Non-selective NDIR array for gas detection, 0000 (1 July 2005); doi: 10.1117/12.607350
Proc. SPIE 5836, Gas microsensing system with a FGMOS on a MEM structure, 0000 (1 July 2005); doi: 10.1117/12.607946
Proc. SPIE 5836, Cheap silicon technology integrated sol-gel combustion sensor, 0000 (1 July 2005); doi: 10.1117/12.608565
Microfluidic Devices I
Proc. SPIE 5836, High speed simultaneous optical and impedance analysis of single particles, 0000 (1 July 2005); doi: 10.1117/12.608633
Applications
Proc. SPIE 5836, Development of a flexible tag microlab, 0000 (1 July 2005); doi: 10.1117/12.607856
Microfluidic Devices I
Proc. SPIE 5836, PCR device with integrated thermal cycling and fluorescence detection elements, 0000 (1 July 2005); doi: 10.1117/12.608646
Fabrication Techniques II
Proc. SPIE 5836, SIGEM, low-temperature deposition of poly-SiGe MEMs structures on standard CMOS circuits, 0000 (1 July 2005); doi: 10.1117/12.608499
Proc. SPIE 5836, Advanced 3D micromachining techniques using V-UV laser sources in the nanosecond regime, 0000 (1 July 2005); doi: 10.1117/12.608818
Proc. SPIE 5836, CAD tool environment for MEMS process design support, 0000 (1 July 2005); doi: 10.1117/12.608517
Mechanical Devices
Proc. SPIE 5836, Model building, control design and practical implementation of a high precision high dynamical MEMS acceleration sensor, 0000 (1 July 2005); doi: 10.1117/12.607830
Proc. SPIE 5836, Post-processing gap reduction in a micromachined resonator for vacuum pressure measurement, 0000 (1 July 2005); doi: 10.1117/12.608312
Proc. SPIE 5836, Testing of a prototype velocity sensor with an internal feedback control loop, 0000 (1 July 2005); doi: 10.1117/12.608630
Proc. SPIE 5836, A novel suspended gate MOSFET pressure sensor, 0000 (1 July 2005); doi: 10.1117/12.608718
Materials II
Proc. SPIE 5836, Amorphous Si deposition method thanks traditional PECVD insulator equipments for seed layers performing, 0000 (1 July 2005); doi: 10.1117/12.608282
Proc. SPIE 5836, Nanocrystalline Bi4Ti3O12 thin film for pressure sensor, 0000 (1 July 2005); doi: 10.1117/12.608444
Microfluidic Devices II
Proc. SPIE 5836, TiNi shape memory alloy based micropumps, 0000 (1 July 2005); doi: 10.1117/12.608506
Proc. SPIE 5836, Integrable silicon microsystem for three-dimensional flow focusing, 0000 (1 July 2005); doi: 10.1117/12.608639
Proc. SPIE 5836, 3D deformation analysis of flow and gas sensors membranes for reliability assessment, 0000 (1 July 2005); doi: 10.1117/12.608660
Proc. SPIE 5836, AC electric field microfluidic control in microsystems, 0000 (1 July 2005); doi: 10.1117/12.608701
Chemical Sensors II
Proc. SPIE 5836, Highly sensitive suspended-gate ion sensitive transistor for the detection of pH, 0000 (1 July 2005); doi: 10.1117/12.607540
Proc. SPIE 5836, Adsorption induced differential surface stress versus adsorption induced resonance frequency change: a comparison, 0000 (1 July 2005); doi: 10.1117/12.608265
Proc. SPIE 5836, A highly sensitive IR-optical sensor for ethylene-monitoring, 0000 (1 July 2005); doi: 10.1117/12.608615
Proc. SPIE 5836, Self-assembly layer of amino fluorenone derivative as optical receptor to detect cyclohexane vapour, 0000 (1 July 2005); doi: 10.1117/12.608493
Actuators II
Proc. SPIE 5836, Design and simulation of comb-drive actuators incorporating gray-scale technology for tailored actuation characteristics, 0000 (1 July 2005); doi: 10.1117/12.608529
Proc. SPIE 5836, Chemical and mechanical sensing in electrochemical actuators, 0000 (1 July 2005); doi: 10.1117/12.605805
Proc. SPIE 5836, Thermopneumatic actuator for tactile displays and smart actuation circuitry, 0000 (1 July 2005); doi: 10.1117/12.607603
Proc. SPIE 5836, Molecular orientation control for thermal and UV-driven polymer MEMS actuators, 0000 (1 July 2005); doi: 10.1117/12.608580
Keynote Presentation
Proc. SPIE 5836, MEMS above IC technology applied to a compact RF module, 0000 (1 July 2005); doi: 10.1117/12.609383
RF MEMS
Proc. SPIE 5836, High-Q micro-machined piezoelectric mechanical filters using coupled cantilever beams, 0000 (1 July 2005); doi: 10.1117/12.607248
Proc. SPIE 5836, A current density distribution approach to the optimisation of RF-MEMS variable capacitors, 0000 (1 July 2005); doi: 10.1117/12.608587
Proc. SPIE 5836, Efficient topology and design methodology for RF MEMS switches, 0000 (1 July 2005); doi: 10.1117/12.609396
Infrared Sensors
Proc. SPIE 5836, Micromachined IR-source with excellent blackbody like behaviour, 0000 (1 July 2005); doi: 10.1117/12.608712
Proc. SPIE 5836, Design of infrared wavelength-selective microbolometers using planar multimode detectors, 0000 (1 July 2005); doi: 10.1117/12.608698
Applications
Proc. SPIE 5836, Development of MEMS based safe electro-thermal pyrotechnic igniter for a new generation of microfuze, 0000 (1 July 2005); doi: 10.1117/12.608082