Dr. Jaione Tirapu-Azpiroz
Researcher at
SPIE Involvement:
Conference Program Committee | Author
Publications (25)

SPIE Journal Paper | June 5, 2018
JM3 Vol. 17 Issue 02
KEYWORDS: Liquids, Microfluidics, Capillaries, Fluid dynamics, Data modeling, Computational fluid dynamics, Image segmentation, Control systems, Instrument modeling, Water

PROCEEDINGS ARTICLE | February 19, 2018
Proc. SPIE. 10491, Microfluidics, BioMEMS, and Medical Microsystems XVI
KEYWORDS: Computational fluid dynamics, Microfluidics, Data modeling, Water, Image segmentation, Capillaries, Control systems, Fluid dynamics, Liquids, Instrument modeling

SPIE Journal Paper | June 27, 2014
JM3 Vol. 13 Issue 02
KEYWORDS: Photomasks, Phase shifts, SRAF, Semiconducting wafers, Lithography, Opacity, Optical lithography, Scattering, Binary data, Polarization

PROCEEDINGS ARTICLE | April 12, 2013
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Diffraction, Data modeling, Calibration, Metals, Error analysis, 3D modeling, Photomasks, Optical proximity correction, Critical dimension metrology, Performance modeling

PROCEEDINGS ARTICLE | March 13, 2012
Proc. SPIE. 8326, Optical Microlithography XXV
KEYWORDS: Lithography, Calibration, Scanning electron microscopy, Printing, Photomasks, Optical proximity correction, SRAF, Photoresist processing, Semiconducting wafers, Process modeling

PROCEEDINGS ARTICLE | October 14, 2011
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Lithography, Optical lithography, Lithographic illumination, Diffractive optical elements, Computer simulations, Photomasks, Source mask optimization, Optics manufacturing, Binary data, Fiber optic illuminators

Showing 5 of 25 publications
Conference Committee Involvement (1)
Microfluidics, BioMEMS, and Medical Microsystems XVII
2 February 2019 | San Francisco, California, United States
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