Dr. Tsann-Bim Chiou
Senior Image Scientist at ASML Taiwan Ltd
SPIE Involvement:
Publications (26)

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12052, 120520G (2022) https://doi.org/10.1117/12.2614225
KEYWORDS: Source mask optimization, Metals, Nanoimprint lithography, Extreme ultraviolet, Photomasks, Logic, Optical lithography, Molybdenum, SRAF, Extreme ultraviolet lithography

Proceedings Article | 22 February 2021 Presentation + Paper
Arup Saha, Brett Schroeder, Tsann-Bim Chiou, Fung Suong Ou
Proceedings Volume 11615, 116150M (2021) https://doi.org/10.1117/12.2584615
KEYWORDS: Photomasks, Lithography, Optical lithography, Monte Carlo methods, Source mask optimization, Etching, Critical dimension metrology, Line width roughness, Atomic layer deposition, Optical proximity correction

Proceedings Article | 2 April 2020 Presentation + Paper
Proceedings Volume 11323, 113231L (2020) https://doi.org/10.1117/12.2552888
KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Logic, Optical lithography, Photomasks, Resolution enhancement technologies, Source mask optimization, Optical proximity correction, Metals, Nanoimprint lithography

Proceedings Article | 16 October 2017 Presentation + Paper
Proceedings Volume 10450, 1045005 (2017) https://doi.org/10.1117/12.2281132
KEYWORDS: Photomasks, SRAF, Extreme ultraviolet, Manufacturing, Optical proximity correction, Extreme ultraviolet lithography, Metals, Inspection, Scanning electron microscopy, Metrology

Proceedings Article | 30 March 2017 Presentation + Paper
Proceedings Volume 10147, 1014707 (2017) https://doi.org/10.1117/12.2260210
KEYWORDS: Light sources, Process control, Image processing, Source mask optimization, Lithography, Critical dimension metrology, Optical proximity correction, Control systems, Overlay metrology, Optical lithography, Eye, Metrology, Electroluminescence

Showing 5 of 26 publications
Conference Committee Involvement (2)
SPIE Lithography Asia - Korea
13 October 2010 | n/a, Republic of Korea
SPIE Lithography Asia - Taiwan
18 November 2009 | Taipei, Taiwan
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