Dr. Joost Bekaert
Lithography Researcher at imec
SPIE Involvement:
Author
Publications (85)

SPIE Journal Paper | 30 January 2025
JM3, Vol. 24, Issue 01, 011012, (January 2025) https://doi.org/10.1117/12.10.1117/1.JMM.24.1.011012
KEYWORDS: Optical proximity correction, Critical dimension metrology, Reflectivity, Extreme ultraviolet, Design, Light sources and illumination, Semiconducting wafers, Extreme ultraviolet lithography, Scanners, Reflection

Proceedings Article | 13 November 2024 Presentation
Natalia Davydova, Airat Galiullin, Cyrus Tabery, Bram Slachter, Adam Lyons, Jeremy Chen, Nick Pellens, Vincent Wiaux, Tatiana Kovalevich, Lieve van Look, Ataklti Weldeslassie, Joost Bekaert
Proceedings Volume PC13215, PC132150A (2024) https://doi.org/10.1117/12.3038962
KEYWORDS: Scanners, Semiconducting wafers, Scanning electron microscopy, Photomasks, Overlay metrology, Optical proximity correction, Metrology, Image processing, Extreme ultraviolet lithography, EUV optics

Proceedings Article | 12 November 2024 Presentation + Paper
Proceedings Volume 13216, 1321604 (2024) https://doi.org/10.1117/12.3047176
KEYWORDS: Metals, Optical lithography, Logic, Semiconducting wafers, Extreme ultraviolet lithography, Etching, Scanning electron microscopy, Lithography, Tin

Proceedings Article | 12 November 2024 Presentation + Paper
Balakumar Baskaran, Mohamed Saib, Bojja Aditya Reddy, Matteo Beggiato, Mihir Gupta, Christophe Beral, Anne-Laure Charley, Gian Lorusso, Joost Bekaert, Philippe Leray
Proceedings Volume 13216, 132160Z (2024) https://doi.org/10.1117/12.3035709
KEYWORDS: Semiconducting wafers, Design, Scanning electron microscopy, Printing, Etching, Metrology, Matrices, Bridges, Extreme ultraviolet

Proceedings Article | 12 November 2024 Presentation + Paper
Darko Trivković, Xuelong Shi, Yi-Pei Tsai, Chieh-Miao Chang, Jane Wang, Victoria Malacara, Balakumar Baskaran, Youssef Drissi, Joost Bekaert, Kenichi Miyaguchi
Proceedings Volume 13216, 132160I (2024) https://doi.org/10.1117/12.3036470
KEYWORDS: Photomasks, Critical dimension metrology, Metrology, Optical proximity correction, Manufacturing, Semiconducting wafers, Logic, Industry, Industrial applications, Silicon photonics

Showing 5 of 85 publications
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